Abstract
We present concepts and an optimization-based methodology for the design of micro-mechanical stages that have not only high precision but also an enhanced range. Joint-free distributed compliant designs provide high precision and easy manufacturability at macro and micro scales. The range of motion is enhanced by using displacement-amplifying compliant mechanisms (DaCMs). The main issue addressed in this paper is how to retain the decoupling between the X and Y motions in the stage when it is equipped with DaCMs. The natural frequency of the stage is also not compromised in enhancing the range. The optimized design has 2.5 times more range than the designs reported in the literature. Furthermore, the sensitivity improved by a factor of two when the stage is optimized for an accelerometer.
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Yin, L., Ananthasuresh, G.K.: Design of distributed compliant mechanisms. Mech. Based Des. Struct. Mach. 31(2), 151–179 (2003)
Howell, L.: Compliant Mechanisms. Wiley, New York (2001)
Canfield, S., Frecker, M.: Topology optimization of compliant mechanical amplifiers for piezo-electric actuators. Struct. Multidiscip. Optim. 20, 269–279 (2000)
Krishnan, G., Ananthasuresh, G.K.: A systematic method for the objective evaluation and selection of compliant displacement amplifying mechanisms for sensor applications. J. Mech. Des. 130(10), 102304:1–102304:9 (2008)
Alper, S.E., Azgin, K., Akin, T.: High-performance SOI-MEMS gyroscope with decoupled oscillation modes. In: MEMS 2006, 22–26 Jan 2006, Istanbul, Turkey
Awtar, S.: Synthesis and analysis of parallel kinematic XY flexure mechanisms. Ph.D. Thesis, Massachusetts Institute of Technology, Cambridge (2006)
Yazdi, N., Ayazi, F., Najafi, K.: Micromachined inertial accelerometers. Proc. IEEE 86, 1640–1658 (1998)
Dinesh, M: Design of two-axis displacement-amplifying compliant mechanisms using topology optimization. Masters thesis, Mechanical Engineering, Indian Institute of Science, Bangalore (2008)
Ananthasuresh, G.K., Dinesh, M.: Compliant platforms to generate amplified displacements, compliant platform for sensing applied motion and method of designing DaCMs. Indian Patent Application No: 01136/CHE/2008
Bendsøe, M.P., Sigmund, O.: Topology Optimization—Theory, Methods, and Applications. Springer-Verlag, New York (2003)
Svanberg, K.: The method of moving asymptotes—a new method for structural optimization. Int. J. Numer. Method Eng. 24, 359–373 (1987)
Hetrick, J., Kota, S.: An energy formulation for parametric size and shape optimization of compliant mechanisms. Trans. ASME J. Mech. Des. 121, 229–234 (1999)
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An erratum to this article can be found at http://dx.doi.org/10.1007/s12572-011-0035-x
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Dinesh, M., Ananthasuresh, G.K. Micro-mechanical stages with enhanced range. Int J Adv Eng Sci Appl Math 2, 35–43 (2010). https://doi.org/10.1007/s12572-010-0014-7
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DOI: https://doi.org/10.1007/s12572-010-0014-7