A Small Bipedal Trans-Scale Precision Positioning Stage Based on Inertial Stick-Slip Driving


The small size and high flexibility of the mobile platform is widely used in many fields such as electron scanning microscope (SEM), but the mobile platform still adopts the structure of guide rail at present and has the problem of large volume and poor flexibility, which cannot meet the requirements of SEM for small cavity. Therefore, this paper proposes a small bipedal trans-scale precision positioning stage based on the inertial stick-slip driving to achieve small size and high flexibility. The mobile platform consists of two piezoelectric actuators, a frame structure, two bottom plates, two pre-tightening screws, and magnets, and the volume is 15 mm × 10 mm × 9.5 mm. To investigate the locomotion characteristics of the mobile platform, a prototype is manufactured, and a series of experiments are carried out. The experimental results show that its linear motion velocity can reach 3.553 mm/s and its angular velocity can reach 462.72mrad/s, which means that the mobile platform has good motion performance.

This is a preview of subscription content, access via your institution.

Fig. 1


  1. 1.

    Jóźwik, I., Strojny-Nędza, A., Chmielewski, M., Pietrzak, K., Kurpaska, Ł, & Nosewicz, S. (2018). High Resolution SEM Characterization of Nano-Precipitates in ODS Steels. Microscopy Research and Technique, 81(5), 502–508.

    Article  Google Scholar 

  2. 2.

    Deng, J., Liu, Y., Li, K., & Zhang, S. (2020). Design, modeling, and experimental evaluation of a compact piezoelectric xy platform for large travel range. IEEE Transaction on Ultrason Ferroelectrics and Frequency Control, 67(4), 863–872.

    Article  Google Scholar 

  3. 3.

    Zhong, B., Zhu, J., Jin, Z., He, H., Sun, L., & Wang, Z. (2019). Improved inertial stick-slip movement performance via driving waveform optimization. Precision Engineering, 55, 260–267.

    Article  Google Scholar 

  4. 4.

    Lee, J., Jin, M., Kashiri, N., Caldwell, D. G., & Tsagarakis, N. G. (2019). Inversion-free force tracking control of piezoelectric actuators using fast finite-time integral terminal sliding-mode. Mechatronics, 57, 39–50.

    Article  Google Scholar 

  5. 5.

    Arora, N., Khan, M. U., Petit, L., Lamarque, F., & Prelle, C. (2019). Design and development of a planar electromagnetic conveyor for the microfactory. IEEE/ASME Transactions on Mechatronics, 24(4), 1723–1731.

    Article  Google Scholar 

  6. 6.

    Wang, J., Huang, H., Zhang, S., Qin, F., Wang, Z., Liang, T., & Zhao, H. (2020). Development and analysis of a stick-slip rotary piezoelectric positioner achieving high velocity with compact structure. Mechanical Systems and Signal Processing, 145, 106895.

    Article  Google Scholar 

  7. 7.

    Zhang, X., & Tzou, H. (2019). Theoretical and experimental studies of a piezoelectric ring energy harvester. Journal of Intelligent Material Systems and Structures, 30(7), 998–1009.

    Article  Google Scholar 

  8. 8.

    Tian, Y., Ma, Y., Wang, F., Lu, K., & Zhang, D. (2020). A novel xyz micro/nano positioner with an amplifier based on l-shape levers and half-bridge structure. Sensors and Actuators A: Physical, 302, 111777.

    Article  Google Scholar 

  9. 9.

    Oubellil, R., Voda, A., Boudaoud, M., & Régnier, S. (2019). Mixed stepping/scanning mode control of stick-slip sem-integrated nano-robotic systems. Sensors and Actuators A: Physical, 285, 258–268.

    Article  Google Scholar 

  10. 10.

    Xiao, R., Shao, S., Xu, M., & Jing, Z. (2019). Design and analysis of a novel piezo-actuated xyθ z micropositioning mechanism with large travel and kinematic decoupling. Advances in Materials Science and Engineering, 2019, 1–15.

    Google Scholar 

  11. 11.

    Huang, S., Liang, W., & Tan, K. K. (2019). Intelligent friction compensation: A review. IEEE/ASME Transactions on Mechatronics, 24(4), 1763–1774.

    Article  Google Scholar 

  12. 12.

    Wei, J., Fatikow, S., Li, H., & Zhang, X. (2019). Design and waveform assessment of a flexible-structure-based inertia-drive motor. Micromachines, 10(11), 771.

    Article  Google Scholar 

  13. 13.

    Wang, S., Rong, W., Wang, L., Xie, H., Sun, L., & Mills, J. K. (2019). A novel linear-rotary piezoelectric positioning stage based on surface’s rectangular trajectory driving. Precision Engineering, 55, 376–380.

    Article  Google Scholar 

  14. 14.

    Zhong, B., Zhu, J., Jin, Z., He, H., Wang, Z., & Sun, L. (2019). A large thrust trans-scale precision positioning stage based on the inertial stick-slip driving. Microsystem Technologies, 25(10), 3713–3721.

    Article  Google Scholar 

Download references


The work was supported by the National Natural Science Foundation of China (No.51875378), the National key research and development program (No. 2018YFB1304900), the Jiangsu province Natural Science Foundation (No. BK20181439).

Author information



Corresponding author

Correspondence to Bowen Zhong.

Additional information

Publisher's Note

Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.

Rights and permissions

Reprints and Permissions

About this article

Verify currency and authenticity via CrossMark

Cite this article

Zhang, X., Zhong, B., Liu, B. et al. A Small Bipedal Trans-Scale Precision Positioning Stage Based on Inertial Stick-Slip Driving. Int. J. Precis. Eng. Manuf. 22, 473–482 (2021). https://doi.org/10.1007/s12541-020-00459-w

Download citation


  • Positioning stage
  • Inertial stick-slip driving
  • Linear motion
  • Angular velocity