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A Small Bipedal Trans-Scale Precision Positioning Stage Based on Inertial Stick-Slip Driving

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Abstract

The small size and high flexibility of the mobile platform is widely used in many fields such as electron scanning microscope (SEM), but the mobile platform still adopts the structure of guide rail at present and has the problem of large volume and poor flexibility, which cannot meet the requirements of SEM for small cavity. Therefore, this paper proposes a small bipedal trans-scale precision positioning stage based on the inertial stick-slip driving to achieve small size and high flexibility. The mobile platform consists of two piezoelectric actuators, a frame structure, two bottom plates, two pre-tightening screws, and magnets, and the volume is 15 mm × 10 mm × 9.5 mm. To investigate the locomotion characteristics of the mobile platform, a prototype is manufactured, and a series of experiments are carried out. The experimental results show that its linear motion velocity can reach 3.553 mm/s and its angular velocity can reach 462.72mrad/s, which means that the mobile platform has good motion performance.

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Acknowledgements

The work was supported by the National Natural Science Foundation of China (No.51875378), the National key research and development program (No. 2018YFB1304900), the Jiangsu province Natural Science Foundation (No. BK20181439).

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Authors and Affiliations

  1. School of Mechanical and Electric Engineering, Soochow University, Suzhou, 215131, China

    Xi Zhang, Bowen Zhong, Bin Liu, Ziqi Jin, Zhenhua Wang & Lining Sun

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  1. Xi Zhang
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  2. Bowen Zhong
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  3. Bin Liu
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  4. Ziqi Jin
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  5. Zhenhua Wang
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  6. Lining Sun
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Correspondence to Bowen Zhong.

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Zhang, X., Zhong, B., Liu, B. et al. A Small Bipedal Trans-Scale Precision Positioning Stage Based on Inertial Stick-Slip Driving. Int. J. Precis. Eng. Manuf. 22, 473–482 (2021). https://doi.org/10.1007/s12541-020-00459-w

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  • DOI: https://doi.org/10.1007/s12541-020-00459-w

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