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Design and Test of the MEMS Coupled Piezoelectric–Electromagnetic Energy Harvester

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Abstract

This paper researches on the design and test of the output performance of double-end clamped MEMS coupled piezoelectric–electromagnetic energy harvester. It establishes the theoretical output model of the double-end clamped rectangular beam and trapezoidal beam piezoelectric–electromagnetic energy harvester, and optimizes the structure parameters of piezoelectric and electromagnetic unit with simulation analysis. It also respectively realizes the processing of piezoelectric and electromagnetic unit by MEMS and flexible PCB technology, and completes the performance test of structure prototype through the experimental system. The result showed that the capacity of MEMS coupled piezoelectric–electromagnetic energy harvester, which taked four coil piezoelectric with integrated electromagnetic in series, was 12.23 times higher than that of piezoelectric energy harvester. Also the output voltage and power of coupled trapezoidal beam energy harvester were respectively increased 18.89% and 2.26%, compared with coupled rectangular beam energy harvester.

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Abbreviations

t :

Time

m ε :

Equivalent mass

c ε :

Equivalent damping

k :

Equivalent stiffness

k 1, k 3 :

Nonlinear stiffness introduced by large deformation

θ:

Coupling coefficient of piezoelectricity

γ:

Coupling coefficient of electromagnetism

z(t):

Displacement function

V(t):

Piezoelectric partial voltage function

i(t):

Electromagnetic partial current function

a(t):

Acceleration

μ :

Calibration factor of the energy harvester system model

R 1 :

Loading resistance of the piezoelectric part

R 2 :

Internal equivalent resistance

R 3 :

Loading resistance of the electromagnetic part

C :

Equivalent capacitance of the piezoelectric part

L :

Equivalent inductance of the electromagnetic part

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Acknowledgements

This work supported by the Natural Science Foundation of Shandong Province, China (ZR201709220253).

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Authors and Affiliations

  1. College of Mechanical and Electronic Engineering, Shandong University of Science and Technology, Qingdao, 266590, China

    Lian-min Cao, Zhi-xu Li, Cheng Guo, Peng-peng Li, Xiang-qiang Meng & Ting-ming Wang

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  1. Lian-min Cao
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  2. Zhi-xu Li
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Correspondence to Lian-min Cao.

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Cao, Lm., Li, Zx., Guo, C. et al. Design and Test of the MEMS Coupled Piezoelectric–Electromagnetic Energy Harvester. Int. J. Precis. Eng. Manuf. 20, 673–686 (2019). https://doi.org/10.1007/s12541-019-00051-x

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