Skip to main content
SpringerLink
Log in

Static and Dynamic Analyses of a 6-DOF Ultra-Precision Parallel Mechanism

  • Regular Paper
  • Published:
International Journal of Precision Engineering and Manufacturing Aims and scope Submit manuscript

Abstract

Flexure-based ultra-precision parallel mechanisms have inherent difference between input and actual output. Lost motion that stems from elasticity of flexure hinges in the parallel mechanism results in gain reduction of actuation. Therefore, static analysis is carried out by calculating directional stiffness and lost motions of actuation units, and is verified by finite element analysis (FEA). Dynamic analysis is performed based on modal analysis with linear mapping matrices to identify the dynamics of the parallel mechanism. Theoretical modal analysis is carried out and then verified by FEA and experiment. The identified lost motion and dynamics are expected to be exploited respectively for gain adjustment and dynamics enhancement for future studies on flexure-based precision parallel mechanisms with 6-DOF.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. Yang, R., Jouaneh, M., and Schweizer, R., “Design and Characterization of a Low-Profile Micropositioning Stage,” Precision Engineering, Vol. 18, No. 1, pp. 20–29, 1996.

    Article  Google Scholar 

  2. Chen, M.-Y., Huang, S.-C., Hung, S.-K., and Fu, L.-C., “Design and Implementation of a New Six-DOF Maglev Positioner with a Fluid Bearing,” IEEE/ASME Transactions on Mechatronics, Vol. 16, No. 3, pp. 449–458, 2011.

    Article  Google Scholar 

  3. Chang, S. H. and Du, B. C., “A Precision Piezodriven Micropositioner Mechanism with Large Travel Range,” Review of Scientific Instruments, Vol. 69, No. 4, pp. 1785–1791, 1998.

    Article  Google Scholar 

  4. Yao, Q., Dong, J., and Ferreira, P. M., “Design, Analysis, Fabrication and Testing of a Parallel-Kinematic Micropositioning XY Stage,” International Journal of Machine Tools and Manufacture, Vol. 47, No. 6, pp. 946–961, 2007.

    Article  Google Scholar 

  5. Kim, H. S., Cho, Y. M., and Moon, J. H., “Active Vibration Control Using a Novel Three-DOF Precision Micro-Stage,” Smart Materials and Structures, Vol. 19, No. 5, Paper No. 055001, 2010.

    Google Scholar 

  6. Shin, H., Lee, S., Jeong, J. I., and Kim, J., “Antagonistic Stiffness Optimization of Redundantly Actuated Parallel Manipulators in a Predefined Workspace,” IEEE/ASME Transactions on Mechatronics, Vol. 18, No. 3, pp. 1161–1169, 2013.

    Article  Google Scholar 

  7. Gao, P. and Swei, S.-M., “A Six-Degree-of-Freedom Micro-Manipulator Based on Piezoelectric Translators,” Nanotechnology, Vol. 10, No. 4, pp. 447–452, 1999.

    Article  Google Scholar 

  8. Choi, K.-B. and Lee, J. J., “Passive Compliant Wafer Stage for Single-Step Nano-Imprint Lithography,” Review of Scientific Instruments, Vol. 76, No. 7, Paper No. 075106, 2005.

    Google Scholar 

  9. Moon, J.-H., Pahk, H. J., and Lee, B.-G., “Design, Modeling, and Testing of a Novel 6-DOF Micropositioning Stage with Low Profile and Low Parasitic Motion,” The International Journal of Advanced Manufacturing Technology, Vol. 55, Nos. 1-4, pp. 163–176, 2011.

    Article  Google Scholar 

  10. Fleming, A. J., Berriman, G., and Yong, Y. K., “Design, Modeling, and Characterization of an XY Nanopositioning Stage Constructed from a Single Sheet of Piezoelectric Material,” Proc. of IEEE International Conference on Advanced Intelligent Mechatronics (AIM), pp. 1333–1338, 2016.

    Google Scholar 

  11. Huang, S.-C. and Dao, T.-P., “Design and Computational Optimization of a Flexure-based XY Positioning Platform Using FEA-based Response Surface Methodology,” International Journal of Precision Engineering and Manufacturing, Vol. 17, No. 8, pp. 1035–1048, 2016.

    Article  Google Scholar 

  12. Hu, K., Kim, J. H., Schmiedeler, J., and Menq, C.-H., “Design, Implementation, and Control of a Six-Axis Compliant Stage,” Review of Scientific Instruments, Vol. 79, No. 2, Paper No. 025105, 2008.

    Google Scholar 

  13. Choi, S. B., Han, S. S., and Lee, Y. S., “Fine Motion Control of a Moving Stage Using a Piezoactuator Associated with a Displacement Amplifier,” Smart Materials and Structures, Vol. 14, No. 1, pp. 222–230, 2004.

    Article  Google Scholar 

  14. Yue, Y., Gao, F., Zhao, X., and Ge, Q. J., “Relationship Among Input-Force, Payload, Stiffness and Displacement of a 3-DOF Perpendicular Parallel Micro-Manipulator,” Mechanism and Machine Theory, Vol. 45, No. 5, pp. 756–771, 2010.

    Article  MATH  Google Scholar 

  15. Awtar, S. and Sen, S., “A Generalized Constraint Model for Two-Dimensional Beam Flexures: Nonlinear Load-Displacement Formulation,” Journal of Mechanical Design, Vol. 132, No. 8, Paper No. 081008, 2010.

    Google Scholar 

  16. Su, H.-J., Shi, H., and Yu, J., “A Symbolic Formulation for Analytical Compliance Analysis and Synthesis of Flexure Mechanisms,” Journal of Mechanical Design, Vol. 134, No. 5, Paper No. 051009, 2012.

    Google Scholar 

  17. Lu, S.-S. and Yan, P., “A Stiffness Modeling Approach for Multi-Leaf Spring Mechanism Supporting Coupling Error Analysis of Nano-Stages,” International Journal of Precision Engineering and Manufacturing, Vol. 18, No. 6, pp. 863–870, 2017.

    Article  Google Scholar 

  18. Shin, H. and Moon, J.-H., “Design of a Double Triangular Parallel Mechanism for Precision Positioning and Large Force Generation,” IEEE/ASME Transactions on Mechatronics, Vol. 19, No. 3, pp. 862–871, 2014.

    Article  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. School of Robot and Automation Engineering, Dongyang Mirae University, 445, Gyeongin-ro, Guro-gu, Seoul, 08221, Republic of Korea

    Hyun-Pyo Shin

  2. Department of Mechatronics Engineering, Yuhan University, 590, Gyeongin-ro, Bucheon-si, Gyeonggi-do, 14780, Republic of Korea

    Jun-Hee Moon

Authors
  1. Hyun-Pyo Shin
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Jun-Hee Moon
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Hyun-Pyo Shin.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Shin, HP., Moon, JH. Static and Dynamic Analyses of a 6-DOF Ultra-Precision Parallel Mechanism. Int. J. Precis. Eng. Manuf. 19, 1019–1026 (2018). https://doi.org/10.1007/s12541-018-0120-1

Download citation

  • Received:

  • Revised:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s12541-018-0120-1

Keywords

Search

Navigation