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Multimodal microscopy test standard for scanning microwave, electron, force and optical microscopy

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Abstract

We report on measurement results of a test standard suitable for different microscopic modalities. These findings were obtained by a multimodal hybrid microscope, which requires various calibration methods, also in terms of its further use as a tool in a nanorobotic environment. A Scanning Probe Microscopy (SPM)-Controller based on an FPGA (Field Programmable Gate Array) enables the submicrometer imaging for atomic force and microwave microscopic modalities. It is embedded in an open source software framework for nanorobotics and -automation and is described in this report.

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Acknowledgements

This research was supported in part by Deutscher Akademischer Austauschdienst (DAAD, Germany) and Greek State Scholarships Foundation (IKY, Greece) project “CalSAS” and by the French-German Agence Nationale de la recherché - Deutsche Forschungsgemeinschaft project “VACSMM” (GZ: FA347/48-1).

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Authors and Affiliations

  1. University of Oldenburg, Oldenburg, Germany

    Olaf C. Haenssler, M. F. Wieghaus & S. Fatikow

  2. Institut d’Electronique, de Microélectronique et de Nanotechnologie, CNRS UMR 8520, University of Lille, Villeneuve d’Ascq, France

    Olaf C. Haenssler

  3. Foundation for Research and Technology, Institute of Electronic Structure & Laser (IESL), Heraklion, Crete, Greece

    A. Kostopoulos, E. Aperathitis & G. Kiriakidis

  4. University of Crete, Heraklion, Crete, Greece

    G. Doundoulakis & G. Kiriakidis

Authors
  1. Olaf C. Haenssler
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  2. M. F. Wieghaus
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  3. A. Kostopoulos
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  4. G. Doundoulakis
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  5. E. Aperathitis
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  6. S. Fatikow
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  7. G. Kiriakidis
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Correspondence to Olaf C. Haenssler.

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Haenssler, O.C., Wieghaus, M.F., Kostopoulos, A. et al. Multimodal microscopy test standard for scanning microwave, electron, force and optical microscopy. J Micro-Bio Robot 14, 51–57 (2018). https://doi.org/10.1007/s12213-018-0108-z

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  • DOI: https://doi.org/10.1007/s12213-018-0108-z

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