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Optical and Irradiation-Resistant Properties of ITO Films on F46 and PI Substrates

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Abstract

This study investigated indium tin oxide (ITO) films that were deposited on fluororesin-46 (F46) and polyimide (PI) transparent flexible substrates by a DC magnetron sputtering system. The optical properties of ITO films on F46 and PI including transmittance and reflectance in visible, near-infrared, and infrared spectral regions were obtained, and the surface morphology, and optical and electrical properties of ITO/F46 and ITO/PI after vacuum ultraviolet irradiation were investigated. The results showed that the mean transmittances of ITO/F46 and ITO/PI decreased and the sheet resistance increased after the irradiation, and these effects were mainly attributed to the greater surface roughness and crystal defects caused by the irradiation.

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Acknowledgements

This work was supported by the Science and Technology on Vacuum Technology and Physics Laboratory under the research Project No. 6142207040104.

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Authors and Affiliations

  1. Science and Technology on Vacuum Technology and Physics Laboratory, Lanzhou Institute of Physics, Lanzhou, 730000, China

    Chao Zhou, Hui Zhou, Yanchun He, Miao Yang, Yuqing Xiong, Lingmao Xu & Yi Wang

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  1. Chao Zhou
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  2. Hui Zhou
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  3. Yanchun He
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  4. Miao Yang
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  5. Yuqing Xiong
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  6. Lingmao Xu
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  7. Yi Wang
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Correspondence to Lingmao Xu.

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Zhou, C., Zhou, H., He, Y. et al. Optical and Irradiation-Resistant Properties of ITO Films on F46 and PI Substrates. Trans. Tianjin Univ. 25, 195–200 (2019). https://doi.org/10.1007/s12209-018-0153-7

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  • DOI: https://doi.org/10.1007/s12209-018-0153-7

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