Transactions of Tianjin University

, Volume 25, Issue 2, pp 195–200 | Cite as

Optical and Irradiation-Resistant Properties of ITO Films on F46 and PI Substrates

  • Chao Zhou
  • Hui Zhou
  • Yanchun He
  • Miao Yang
  • Yuqing Xiong
  • Lingmao XuEmail author
  • Yi Wang
Research Article


This study investigated indium tin oxide (ITO) films that were deposited on fluororesin-46 (F46) and polyimide (PI) transparent flexible substrates by a DC magnetron sputtering system. The optical properties of ITO films on F46 and PI including transmittance and reflectance in visible, near-infrared, and infrared spectral regions were obtained, and the surface morphology, and optical and electrical properties of ITO/F46 and ITO/PI after vacuum ultraviolet irradiation were investigated. The results showed that the mean transmittances of ITO/F46 and ITO/PI decreased and the sheet resistance increased after the irradiation, and these effects were mainly attributed to the greater surface roughness and crystal defects caused by the irradiation.


Indium tin oxide Transparent flexible substrates Optical properties Vacuum ultraviolet irradiation-resistant property 



This work was supported by the Science and Technology on Vacuum Technology and Physics Laboratory under the research Project No. 6142207040104.


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Copyright information

© Tianjin University and Springer-Verlag GmbH Germany, part of Springer Nature 2018

Authors and Affiliations

  • Chao Zhou
    • 1
  • Hui Zhou
    • 1
  • Yanchun He
    • 1
  • Miao Yang
    • 1
  • Yuqing Xiong
    • 1
  • Lingmao Xu
    • 1
    Email author
  • Yi Wang
    • 1
  1. 1.Science and Technology on Vacuum Technology and Physics LaboratoryLanzhou Institute of PhysicsLanzhouChina

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