Development of batch proportional-integral-derivative controller
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Previous batch control methods, such as iterative learning control (ILC) or run-to-run (R2R) control, can significantly improve the control performance of the batch process. However, to guarantee the expected good control performance, a fairly accurate process model is required for these controllers. Also, the implementation is numerically complicated so that it is difficult to be applied to real manufacturing processes. To overcome these problems, a new batch proportional-integral-derivative (PID) control method is proposed, which borrows the concept of the conventional PID control method. Simulation studies confirm that the proposed method shows acceptable performance in tracking a setpoint trajectory, rejecting disturbances, and robustness to noises and variation of process dynamics. The application to the commercial batch process of a single crystal grower verifies that the proposed method can significantly contribute to improving the control performances of real batch processes.
KeywordsBatch Process Batch Controller Batch PID Controller Feed Forward Controller Czochralski Process
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