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Three-Dimensional Optical Microscope Provides High Combined Lateral and Vertical Resolution
Contour Elite 3D optical microscopes from Bruker provide the high sensitivity and stability necessary for precision 3-D surface measurements in applications and environments that are challenging for other metrology systems, such as R&D applications within the semiconductor and MEMS markets. Critical metrology includes measurements of film thickness and substrate roughness, as well as monitoring and validating key dimensional parameters such as RA roughness, pitch, width, and height.
For more information: Bruker Daltonics Inc., 40 Manning Road, Manning Park, Billerica, MA 01821; Tel: 978/663-3660; E-mail: email@example.com; web: www.bruker.com.