Journal of Failure Analysis and Prevention

, Volume 17, Issue 3, pp 407–407 | Cite as

Product News


Three-Dimensional Optical Microscope Provides High Combined Lateral and Vertical Resolution

Contour Elite 3D optical microscopes from Bruker provide the high sensitivity and stability necessary for precision 3-D surface measurements in applications and environments that are challenging for other metrology systems, such as R&D applications within the semiconductor and MEMS markets. Critical metrology includes measurements of film thickness and substrate roughness, as well as monitoring and validating key dimensional parameters such as RA roughness, pitch, width, and height.

Contour Elite systems are said to provide the best combined lateral and vertical resolution over the industry’s largest field of view, with a sub-nanometer to greater than 10 mm (0.4 in.) vertical range. They also include high-fidelity imaging that reveals specific surface details—minute details that otherwise would be difficult or impossible to see. Data segmentation based on color or grayscale information enables users to rapidly select areas of interest and collect critical metrology data from specific regions. This, combined with the ability to build a vivid graphic representation of a magnified zoom into the part, gives the user the ability to actually see the sample along with its true 3D topography, leading to better problem solving in engineered surface applications.

Bruker Contour Elite 3D optical microscope

For more information: Bruker Daltonics Inc., 40 Manning Road, Manning Park, Billerica, MA 01821; Tel: 978/663-3660; E-mail:; web:

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© ASM International 2017

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