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Journal of Failure Analysis and Prevention

, Volume 12, Issue 1, pp 37–40 | Cite as

Product News

Article

Textured Alumina Enhances Adhesion for Plasma Deposition

Morgan Technical Ceramics has received a U.S. trademark for Sharkskin high-roughness textured alumina material. Sharkskin provides a high-roughness surface texture integral to the alumina-base material. The roughened surface improves process residue adhesion for film processes, primarily for physical vapor deposition (PVD), plasma-enhanced PVD, and chemical vapor deposition (CVD). The improved adhesion enhances equipment productivity by extending service life, reducing overall particulate defects, and reducing the total number of preventative maintenance cycles per chamber.

The use of Sharkskin enables reliable deposition of highly compressive films. Chip manufacturing companies have already been successful in using Sharkskin in a PVD deposition chamber within a production environment. Sharkskin prototype and volume production capabilities include green or fired parts and new and used parts. The material is suited for parts with...

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