Broadband optical metasurfaces are gaining enormous attention owing to their potential applications in optoelectronic devices, sensors, and flat optics. Here, we demonstrate for the first time a single-step, novel wet-chemical etching-based nanofabrication method to produce broadband random plasmonic metasurfaces (RPMS). The nanofabrication method is inexpensive, simple, versatile, and compatible with semiconductor processing technologies. The RPMS is made of a single-layer optically thick Ag thin film nanostructured with random nanoholes and nanocavities. The building block of the RPMS is a multi-resonant meta-cell composed of disordered nanoholes with variety of sizes, shapes, and aspect ratios. The composition of the multi-resonant meta-cell can be modified by varying the duration of immersion (DoI) of the Ag thin films in the etchant solution. The RPMS exhibits broadband extraordinary transmission in the 550–800 nm wavelength range with an efficiency of transmission of 2.3. Broadband absorption of light is observed in the entire visible region; incident light is strongly absorbed (~70%) in the nanocavities via localized surface plasmons (LSPs) in the 400–550 nm wavelength range. Further, 40–50% of the light is absorbed in the metal film via surface plasmon polaritons (SPPs) excited by the multi-resonant meta-cells, elsewhere on the spectrum. The RPMS exhibits Lambertian type scattering with nearly 50% efficiency in the entire visible wavelength range. The RPMS with these broadband optical properties can find useful applications in plasmonic solar cells, surface-enhanced Raman spectroscopy (SERS), thermoplasmonic devices, and plasmoelectric potentials based all-metal optoelectronic devices.
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Pors A, Nielsen GM, Eriksen LR, Bozhevolnyi SI (2013) Broadband focusing flat mirrors based on plasmonic gradient metasurfaces. Nano Lett 13:829–834
Zhong J, An N, Yi N, Zhu M, Song Q, Xiao S (2016) Broadband and tunable-focus flat lens with dielectric metasurface. Plasmonics 11:537–541
Pala AR, Butun S, Aydin K, Atwater AH (2016) Omnidirectional and broadband absorption enhancement from trapezoidal Mie resonators in semiconductor metasurfaces. Sci Rep 6:1–7
Li W, Ying Y, Qiao X, Li Q, Qiao L, Zheng J, Jiang L, Che S (2016) Plasmonic metasurface for light absorption enhancement in GaAs thin film. Plasmonics 11:1401–1406
Zhang N, Liu K, Liu Z, Song H, Zang X, Ji D, Cheney A, Jiang S, Gan Q (2015) Ultrabroadband metasurface for efficient light trapping and localization: a universal surface-enhanced Raman spectroscopy substrate for “all” excitation wavelengths. Adv Mater Interfaces 2:1500142–1500148
Luo XG (2015) Principles of electromagnetic waves in metasurfaces. Sci China Phys Mech Astron 58:594201–594218
Yu N, Capasso F (2015) Optical metasurfaces and prospect of their applications including fiber optics. J Lightwave Technol 33:2344–2358
Garcia-Vidal FJ, Martin-Moreno L, Pendry JB (2005) Surfaces with holes in them: new plasmonic metamaterials. J Opt A Pure Appl Opt 7:S97–S101
Meinzer N, Barnes LW, Hooper RI (2014) Plasmonic meta-atoms and metasurfaces. Nat Photonics 8:889–898
Genet C, Ebbesen TW (2007) Light in tiny holes. Nature 445:39–46
Kildishev VA, Boltasseva A, Shalaev MV (2013) Planar photonics with metasurfaces. Science 339:1232009–1232014
Yu N, Capasso F (2014) Flat optics with designer metasurfaces. Nat Mater 13:139–150
Najafabadi FA, Pakizeh T (2018) Optical circular conversion dichroism via heterogeneous planar nanoplasmonic metasurface. Plasmonics. https://doi.org/10.1007/s11468-017-0684-0
Hedayati KM, Elbahri M (2017) Review of metasurface plasmonic structural color. Plasmonics 12:1463–1479
Marcellis DA, Palange E, Janneh M, Rizza C, Giattoni A, Mengali S (2017) Design optimization of plasmonic metasurfaces for mid-infrared high-sensitivity chemical sensing. Plasmonics 12:293–298
Tordera D, Zhao D, Volkov VA, Crispin X, Jonsson PM (2017) Thermoplasmonic semitransparent nanohole electrodes. Nano Lett 17:3145–3151
Sheldon TM, van de Groep J, Brown MA, Polaman A, Atwater AH (2014) Plasmonic electric potentials in metal nanostructures. Science 346:828–831
Vynck K, Burresi M, Riboli F, Wiersma S (2012) Photon management in two-dimensional disordered media. Nat Mater 11:1017–1022
Atwater AH, Polman A (2010) Plasmonics for improved photovoltaic devices. Nat Mater 9:205–213
Pendry JB, Schurig D, Smith DR (2006) Controlling electromagnetic fields. Science 312:1780–1782
Ye D, Wang Z, Wang Z, Kuiwen X, Zhang B, Huangfu J (2012) Towards experimental perfectly matched layers with ultra-thin metamaterial surfaces. IEEE Trans Antennas Propag 60(11):5164–5172
Zhang B, Hendrickson J, Guo J (2013) Multispectral near-perfect metamaterial absorber using spatially multiplexed plasmon resonance metal square structures. J Opt Soc Am B 30:656–662
Jang M, Horie Y, Shibukawa A, Brake J, Liu Y, Kamali MS, Arbabi A, Ruan H, Faraon A, Yang C (2018) Wavefront shaping with disorder-engineered metasurfaces. Nat Photonics 12:84–90
Bertolotti J (2018) Designing disorder. Nat Photonics 12:59–67
Dupre M, Hsu L, Kante B (2018) On the design of random metasurface devices. arXiv:1802.01202
Reilly TH, Tenent RC, Barnes MT, Rowlen KL, van de Lagemaat J (2010) Controlling the optical properties of disordered nanohole silver films. ACS Nano 4:615–624
Petoukhoff CE, O’Carroll DM (2015) Absorption-induced scattering and surface plasmon out-coupling from absorber-coated plasmonic metasurfaces. Nat Commun 6:1–13
Akselrod MG, Huang J, Hoang BT, Bowen TP, Su L, Smith RD, Mikkelsen HM (2015) Large-area metasurface perfect absorbers from visible to near-infrared. Adv Mater 27:8028–8034
Piragash Kumar RM, Venkatesh A, Moorthy VHS (2016) Process of formation of disordered nano-holes in optically thick silver films. Indian patent. Filing no. 201641037059
Ghodssi R, Lin P (2011) MEMS materials and processes handbook. In: Burns WD (ed) MEMS wet-etch processes and procedures. Springer, New York, pp 457–665
Sannomiya T, Scholder O, Jefimovs K, Hafner C, Dahlin AB (2011) Investigation of plasmon resonances in metal films with nanohole arrays for biosensing applications. Small 7:1653–1663
Przybilla F, Degiron A, Laluet J-Y, Genet C, Ebbesen TW (2006) Optical transmission in perforated noble and transition metal films. J Opt A Pure Appl Opt 8:458–463
Koerkamp KJK, Enoch S, Segerink BF, van Hulst FN, Kuipers L (2004) Strong influence of hole shape on extraordinary transmission through periodic arrays of subwavelength holes. Phys Rev Lett 92:183901–183904
Teperik TV, Garcia De Abajo FJ, Borisov AG, Abdelsalam M, Bartlett PN, Sugawara Y, Baumberg JJ (2018) Omnidirectional absorption in nanostructured metal surfaces. Nat Photonics 2:299–301
Perney NMB, Garcia de Abajo FJ, Baumberg JJ, Tang A, Netti MC, Charlton MDB, Zoorob ME (2007) Tuning localized plasmon cavities for optimized surface-enhanced Raman scattering. Phys Rev B 76:035426–035430
Zongfu Y, Rama A, Fan S (2010) Fundamental limit of nanophotonic light trapping in solar cells. Proc Natl Acad Sci U S A 107:17491–17496
The authors would like to acknowledge the support of Dr. M. G. Sreenivasan (Technical Manager, Hind High Vacuum Company Pvt. Ltd. India) in performing the optical spectroscopy measurements for the present study. Dr. V. H. S wants to acknowledge Dr. R. Bhattacharya, Honorary Adjunct Professor, IIEST, Shibpur, India for introducing him to the exciting field of plasmonics.
The authors would like to thank the Department of Science and Technology (DST), India (Grant no: DST/TM/SERI/2K10/63(G)) and Department of Biotechnology (DBT), India (Grant no: BT/PR12874/NNT/28/452/2009)) for financially supporting the research work.
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R. M., P., A., V. & V. H. S., M. Wet-Chemical Etching: a Novel Nanofabrication Route to Prepare Broadband Random Plasmonic Metasurfaces. Plasmonics 14, 365–374 (2019). https://doi.org/10.1007/s11468-018-0813-4
- Wet-chemical etching
- Random plasmonic metasurfaces
- Optical metasurfaces
- Broadband absorption
- Scattering and plasmonic solar cells