Analysis and control of micro-stepping characteristics of ultrasonic motor

Abstract

Micro-stepping motion of ultrasonic motors satisfies biomedical applications, such as cell operation and nuclear magnetic resonance, which require a precise compact-structure non-magnetization positioning device. When the pulse number is relatively small, the stopping characteristics have a non-negligible effect on the entire stepwise process. However, few studies have been conducted to show the rule of the open-loop stepwise motion, especially the shutdown stage. In this study, the modal differences of the shutdown stage are found connected with amplitude and velocity at the turn-off instant. Changes of the length in the contact area and driving zone as well as the input currents, vibration states, output torque, and axial pressure are derived by a simulation model to further explore the rules. The speed curves and vibration results in functions of different pulse numbers are compared, and the stepwise motion can be described by a two-stage two-order transfer function. A test workbench based on the Field Programmable Gate Array is built for acquiring the speed, currents, and feedback voltages of the startup-shutdown stage accurately with the help of its excellent synchronization performances. Therefore, stator vibration, rotor velocity, and terminal displacements under different pulse numbers can be compared. Moreover, the two-stage two-order model is identified on the stepwise speed curves, and the fitness over 85% between the simulation and test verifies the model availability. Finally, with the optimization of the pulse number, the motor achieves 3.3 µrad in clockwise and counterclockwise direction.

References

  1. 1.

    Xu D, Liu Y, Shi S, et al. Development of a non-resonant piezoelectric motor with nanometer resolution driving ability. IEEE/ASME Transactions on Mechatronics, 2018, 23(1): 444–451

    Article  Google Scholar 

  2. 2.

    Xu D, Liu Y, Liu J, et al. Developments of a piezoelectric actuator with nano-positioning ability operated in bending modes. Ceramics International, 2017, 43: S21–S26

    Article  Google Scholar 

  3. 3.

    Huang W, Tao J, Sun M, et al. Modeling and experiment of precision rotary positioner with large stroke driven by non-resonant piezoelectric motor. Optics and Precision Engineering, 2016, 24(11): 2712–2720 (in Chinese)

    Article  Google Scholar 

  4. 4.

    Chen X, Huang W, Lu Q, et al. Working mechanism of a kind of non-resonant linear piezoelectric motor with flexible driving end. Transactions of Nanjing University of Aeronautics and Astronautics, 2018, 35(5): 749–759

    Google Scholar 

  5. 5.

    Wang L, Liu Y, Li K, et al. Development of a resonant type piezoelectric stepping motor using longitudinal and bending hybrid bolt-clamped transducer. Sensors and Actuators A: Physical, 2019, 285: 182–189

    Article  Google Scholar 

  6. 6.

    Zhang Q, Chen W, Liu Y, et al. A frog-shaped linear piezoelectric actuator using first-order longitudinal vibration mode. IEEE Transactions on Industrial Electronics, 2017, 64(3): 2188–2195

    Article  Google Scholar 

  7. 7.

    Liu J, Liu Y, Zhao L, et al. Design and experiments of a single-foot linear piezoelectric actuator operated in stepping mode. IEEE Transactions on Industrial Electronics, 2018, 65(10): 8063–8071

    Article  Google Scholar 

  8. 8.

    Shi W, Zhao H, Ma J, et al. Dead-zone compensation of an ultrasonic motor using an adaptive dither. IEEE Transactions on Industrial Electronics, 2018, 65(5): 3730–3739

    Article  Google Scholar 

  9. 9.

    Jin J, Zhao C. Linear ultrasonic motor using quadrate plate transducer. Frontiers of Mechanical Engineering in China, 2009, 4(1): 88–91

    MathSciNet  Article  Google Scholar 

  10. 10.

    Song L, Shi J Z. Nonlinear Hammerstein model of ultrasonic motor for position control using differential evolution algorithm. Ultrasonics, 2019, 94: 20–27

    Article  Google Scholar 

  11. 11.

    Abdullah M, Takeshi M. Efficiency optimization of rotary ultrasonic motors using extremum seeking control with current feedback. Sensors and Actuators A: Physical, 2018, 289: 26–33

    Google Scholar 

  12. 12.

    Shi S, Chen W, Liu J, et al. Ultrasonic linear motor using the L-B mode Langevin transducer with an exponential horn. Frontiers of Mechanical Engineering in China, 2008, 3(2): 212–217

    Article  Google Scholar 

  13. 13.

    Zhang H, Shi Y, Zhao C. Precision control system of two-DOF stage with linear ultrasonic motor. Frontiers of Mechanical Engineering in China, 2008, 3(4): 421–425

    Article  Google Scholar 

  14. 14.

    Mohd Romlay F R, Wan Yusoff W A, Mat Piah K A. Increasing the efficiency of traveling wave ultrasonic motor by modifying the stator geometry. Ultrasonics, 2016, 64: 177–185

    Article  Google Scholar 

  15. 15.

    Jin J, Zhao C. Bi-modes alternation stepping ultrasonic motors. Frontiers of Mechanical Engineering in China, 2008, 3(1): 101–105

    Article  Google Scholar 

  16. 16.

    Wang G Q, Tan J P, Zhao Z X, et al. Mechanical and energetic characteristics of an energy harvesting type piezoelectric ultrasonic actuator. Mechanical Systems and Signal Processing, 2019, 128: 110–125

    Article  Google Scholar 

  17. 17.

    Liang W, Ma J, Tan K K. Contact force control on soft membrane for an ear surgical device. IEEE Transactions on Industrial Electronics, 2018, 65(12): 9593–9603

    Article  Google Scholar 

  18. 18.

    Flueckiger M, Bullo M, Chapuis D, et al. FMRI compatible haptic interface actuated with traveling wave ultrasonic motor. In: Proceedings of IEEE Industry Applications Conference Fortieth IAS Annual Meeting. Hong Kong: IEEE, 2005

    Google Scholar 

  19. 19.

    Chapuis D, Gassert R, Burdet E, et al. Hybrid ultrasonic motor and electrorheological clutch system for MR-compatible haptic rendering. In: Proceedings of IEEE/RSJ International Conference on Intelligent Robots & Systems. Beijing: IEEE, 2006

    Google Scholar 

  20. 20.

    Kandare G, Wallaschek J. Derivation, and validation of a mathematical model for traveling wave ultrasonic motors. Smart Materials and Structures, 2002, 11(4): 565–574

    Article  Google Scholar 

  21. 21.

    Boumous Z, Belkhiat S, Kebbab F Z. Effect of shearing deformation on the transient response of a traveling wave ultrasonic motor. Sensors and Actuators A: Physical, 2009, 150(2): 243–250

    Article  Google Scholar 

  22. 22.

    Nakagawa Y, Saito A, Maeno T. Nonlinear dynamic analysis of traveling wave-type ultrasonic motors. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 2008, 55(3): 717–725

    Article  Google Scholar 

  23. 23.

    Nakamura K, Kurosawa M, Kurebayashi H, et al. An estimation of load characteristics of an ultrasonic motor by measuring transient responses. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 1991, 38(5): 481–485

    Article  Google Scholar 

  24. 24.

    Shen S, Huang W, Zhao C. Wavelet transform applied to test and analysis on starting-up and stopping responses of the ultrasonic motor. In: Proceedings of IEEE Symposium on Ultrasonics. Honululu: IEEE, 2003

    Google Scholar 

  25. 25.

    Wu X, Hua L, Qiang Y, et al. Studies on stepping characteristics of the traveling-wave ultrasonic motor. In: Proceedings of 2011 International Conference on Electronics Optoelectronics. Dalian: IEEE, 2011

    Google Scholar 

  26. 26.

    Zhao C. Ultrasonic Motors: Technologies and Applications. Beijing: Springer, 2011

    Google Scholar 

  27. 27.

    El Ghouti N. Hybrid modeling of a traveling eave piezoelectric motor. Dissertation for the Doctoral Degree. Aalborg: Aalborg University, 2000, 95–177

    Google Scholar 

  28. 28.

    Shi W, Zhao H, Ma J, et al. Optimal working frequency of ultrasonic motors. Ultrasonics, 2016, 70: 38–44

    Article  Google Scholar 

  29. 29.

    Shi W, Zhao H, Ma J, et al. An optimum-frequency tracking scheme for ultrasonic motor. IEEE Transactions on Industrial Electronics, 2017, 64(6): 4413–4422

    Article  Google Scholar 

  30. 30.

    Li S Y, Ou W C, Yang M, et al. Temperature evaluation of travelingwave ultrasonic motor considering the interaction between temperature rise and motor parameters. Ultrasonics, 2015, 57: 159–166

    Article  Google Scholar 

  31. 31.

    NI Inc. NI R Series Multifunction RIO Specification. Integrated Analog and Digital I/O with FPGA Technology. 2014

  32. 32.

    Vezzoli E, Vidrih Z, Giamundo V, et al. Friction reduction through ultrasonic vibration Part 1: Modelling intermittent contact. IEEE Transactions on Haptics, 2017, 10(2): 196–207

    Article  Google Scholar 

  33. 33.

    Sednaoui T, Vezzoli E, Dzidek B M, et al. Friction reduction through ultrasonic vibration Part 2: Experimental evaluation of intermittent contact and squeeze film levitation. IEEE Transactions on Haptics, 2017, 10(2): 208–216

    Article  Google Scholar 

  34. 34.

    Storck H, Littmann W, Wallaschek J, et al. The effect of friction reduction in the presence of ultrasonic vibrations and its relevance to traveling wave ultrasonic motors. Ultrasonics, 2002, 40(1–8): 379–383

    Article  Google Scholar 

  35. 35.

    Chen Z H, Zhao C C, Huang W Q. An effective frequency tracking control and balancing compensation between CW & CCW rotation speed techniques for the ultrasonic motor. In: Proceedings of Ultrasonics Symposium. Monreal: IEEE, 2004

    Google Scholar 

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Acknowledgements

The authors acknowledge the financial support from the National Basic Research Program of China (973 Program) (Grant No. 2015CB057503). The authors declare no conflict of interest.

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Correspondence to Dapeng Fan.

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Chen, N., Zheng, J., Jiang, X. et al. Analysis and control of micro-stepping characteristics of ultrasonic motor. Front. Mech. Eng. 15, 585–599 (2020). https://doi.org/10.1007/s11465-019-0577-3

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Keywords

  • ultrasonic motor
  • stepping characteristics
  • pulse number control
  • synchronous acquisition system
  • precise positioning