Frontiers of Mechanical Engineering

, Volume 12, Issue 2, pp 265–278 | Cite as

Mechatronic design of a novel linear compliant positioning stage with large travel range and high out-of-plane payload capacity

  • Hua Liu
  • Xin Xie
  • Ruoyu Tan
  • Lianchao Zhang
  • Dapeng Fan
Research Article


Most of the XY positioning stages proposed in previous studies are mainly designed by considering only a single performance indicator of the stage. As a result, the other performance indicators are relatively weak. In this study, a 2-degree-of-freedom linear compliant positioning stage (LCPS) is developed by mechatronic design to balance the interacting performance indicators and realize the desired positioning stage. The key parameters and the coupling of the structure and actuators are completely considered in the design. The LCPS consists of four voice coil motors (VCMs), which are conformally designed for compactness, and six spatial leaf spring parallelograms. These parallelograms are serially connected for a large travel range and a high out-of-plane payload capacity. The mechatronic model is established by matrix structural analysis for structural modeling and by Kirchhoff’s law for the VCMs. The sensitivities of the key parameters are analyzed, and the design parameters are subsequently determined. The analytical model of the stage is confirmed by experiments. The stage has a travel range of 4.4 mm × 7.0 mm and a 0.16% area ratio of workspace to the outer dimension of the stage. The values of these performance indicators are greater than those of any existing stage reported in the literature. The closed-loop bandwidth is 9.5 Hz in both working directions. The stage can track a circular trajectory with a radius of 1.5 mm, with 40 mm error and a resolution of lower than 3 mm. The results of payload tests indicate that the stage has at least 20 kg outof- plane payload capacity.


mechatronic design linear compliant positioning stage large travel range high out-of-plane payload capacity spatial parallelogram voice coil motor sensitivity analysis 


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This research was supported by the National Natural Science Foundation of China (Grant No. 51135009). The authors would like to thank the reviewers for their excellent comments and suggestions.


  1. 1.
    Aoki K, Yanagita Y, Kuroda H, et al. Wide-range fine pointing mechanism for free-space laser communications. Proceedings of SPIE, Free-Space Laser Communication and Active Laser Illumination III, 2004, 5160: 495–506CrossRefGoogle Scholar
  2. 2.
    Yong Y K, Moheimani S O R, Kenton B J, et al. Invited review article: High-speed flexure-guided nanopositioning mechanical design and control issues. Review of Scientific Instruments, 2012, 83(12): 121101CrossRefGoogle Scholar
  3. 3.
    Kenton B J, Leang K K. Design and control of a three-axis serialkinematic high-bandwidth nanopositioner. IEEE/ASME Transactions on Mechatronics, 2012, 17(2): 356–369CrossRefGoogle Scholar
  4. 4.
    Chen H T H, Ng W, Engelstad R L. Finite element analysis of a scanning x-ray microscope micropositioning stage. Review of Scientific Instruments, 1992, 63(1): 591–594CrossRefGoogle Scholar
  5. 5.
    Muthuswamy J, Salas D, Okandan M. A chronic micropositioning system for neurophysiology. In: Proceedings of the Second Joint Engineering in Medicine and Biology, 2002. 24th Annual Conference and the Annual Fall Meeting of the Biomedical Engineering Society EMBS/BMES Conference. Houston: IEEE, 2002, 3: 2115–2116Google Scholar
  6. 6.
    Howell L L. Compliant Mechanisms. New York: John Wiley & Sons, Inc., 2001Google Scholar
  7. 7.
    Smith S T. Flexures: Elements of Elastic Mechanisms. Boca Raton: CRC Press, 2000Google Scholar
  8. 8.
    Teo T J, Chen I M, Yang G, et al. A flexure-based electromagnetic linear actuator. Nanotechnology, 2008, 19(31): 315501CrossRefGoogle Scholar
  9. 9.
    Zhu X, Xu X, Wen Z, et al. A novel flexure-based vertical nanopositioning stage with large travel range. Review of Scientific Instruments, 2015, 86(10): 105112CrossRefGoogle Scholar
  10. 10.
    Xu Q. Design and development of a compact flexure-based precision positioning system with centimeter range. IEEE Transactions on Industrial Electronics, 2014, 61(2): 893–903CrossRefGoogle Scholar
  11. 11.
    Shang J, Tian Y, Li Z, et al. A novel voice coil motor-driven compliant micropositioning stage based on flexure mechanism. Review of Scientific Instruments, 2015, 86(9): 095001CrossRefGoogle Scholar
  12. 12.
    Kang D, Kim K, Kim D, et al. Optimal design of high precision XYscanner with nanometer-level resolution and millimeter-level working range. Mechatronics, 2009, 19(4): 562–570CrossRefGoogle Scholar
  13. 13.
    Huh J S, Kim K H, Kang D W, et al. Performance evaluation of precision nanopositioning devices caused by uncertainties due to tolerances using function approximation moment method. Review of Scientific Instruments, 2006, 77(1): 015103CrossRefGoogle Scholar
  14. 14.
    Gao W, Dejima S, Yanai H, et al. A surface motor-driven planar motion stage integrated with an XYθZ surface encoder for precision positioning. Precision Engineering, 2004, 28(3): 329–337CrossRefGoogle Scholar
  15. 15.
    Xiao S, Li Y. Optimal design, fabrication, and control of an micropositioning stage driven by electromagnetic actuators. IEEE Transactions on Industrial Electronics, 2013, 60(10): 4613–4626CrossRefGoogle Scholar
  16. 16.
    Przemieniecki J S. Theory of Matrix Structural Analysis. New York: McGraw-Hill, 1968zbMATHGoogle Scholar
  17. 17.
    Furlani E P. Permanent Magnet and Electromechanical Devices. San Diego: Academic Press, 2001Google Scholar
  18. 18.
    Kim H, Kim J, Ahn D, et al. Development of a nanoprecision 3-DOF vertical positioning system with a flexure hinge. IEEE Transactions on Nanotechnology, 2013, 12(2): 234–245CrossRefGoogle Scholar
  19. 19.
    Xu Q. New flexure parallel-kinematic micropositioning system with large workspace. IEEE Transactions on Robotics, 2012, 28(2): 478–491CrossRefGoogle Scholar

Copyright information

© Higher Education Press and Springer-Verlag GmbH Germany 2017

Authors and Affiliations

  • Hua Liu
    • 1
  • Xin Xie
    • 1
  • Ruoyu Tan
    • 1
  • Lianchao Zhang
    • 1
  • Dapeng Fan
    • 1
  1. 1.College of Mechatronic Engineering and AutomationNational University of Defense TechnologyChangshaChina

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