Review of self-referenced measurement algorithms: Bridging lateral shearing interferometry and multi-probe error separation
- 66 Downloads
With the development of new materials and ultra-precision processing technology, the sizes of measured objects increase, and the requirements for machining accuracy and surface quality become more exacting. The traditional measurement method based on reference datum is inadequate for measuring a high-precision object when the quality of the reference datum is approximately within the same order as that of the object. Self-referenced measurement techniques provide an effective means when the direct reference-based method cannot satisfy the required measurement or calibration accuracy. This paper discusses the reconstruction algorithms for self-referenced measurement and connects lateral shearing interferometry and multi-probe error separation. In lateral shearing interferometry, the reconstruction algorithms are generally categorized into modal or zonal methods. The multi-probe error separation techniques for straightness measurement are broadly divided into two-point and three-point methods. The common features of the lateral shearing interferometry method and the multi-probe error separation method are identified. We conclude that the reconstruction principle in lateral shearing interferometry is similar to the two-point method in error separation on the condition that no yaw error exists. This similarity may provide a basis or inspiration for the development of both classes of methods.
Keywordsself-referenced measurement lateral shearing interferometry multi-probe error separation surface metrology
Unable to display preview. Download preview PDF.
This work was supported in part by the National Natural Science Foundation of China (Grant Nos. 51575520 and 51375488).
- 2.International Vocabulary of Metrology—Basic and General Concepts and Associated Terms. (VIM 3rd edition), JCGM 200:2012, http://www.bipm.org/en/publications/guides/#vimGoogle Scholar
- 4.PHYSICS. The SID4 HR sensor. http://www.phasicscorp.com/products/wavefront-sensors/sid4-hr-wavefront-sensor.htmlGoogle Scholar
- 5.Korwan D. Lateral shearing interferogram analysis. Proceedings of the Society for Photo-Instrumentation Engineers, 1983, 429: 194–198Google Scholar
- 23.Dai G M. Modified Hartmann-Shack wavefront sensing and iterative wavefront reconstruction. Proceedings of the Society for Photo-Instrumentation Engineers, Adaptive Optics in Astronomy, 1994, 2201: 562–573Google Scholar
- 29.De Nicola S M, Ferraro P, Finizio A, et al. Wave front aberration analysis in two beam reversal shearing interferometry by elliptical Zernike polynomials. Proceedings of the Society for Photo- Instrumentation Engineers, Laser Optics, 2004, 5481: 27–36Google Scholar
- 31.Saunders J B. Measurement of wave fronts without a reference standard. Part 1. The wave-front-shearing interferometer. Journal of Research of the National Bureau of Standards—B. Mathematics and Mathematical Physics, 1961, 65B(4): 239–244Google Scholar
- 49.Shiozawa H, Fukutomi Y. Development of an ultra-precision 3DCMM with the repeatability of nanometer order. JSPE Publications Series, 1999, 3: 360–365 (in Japanese)Google Scholar
- 50.Negishi M, et al. A high-precision coordinate measurement machine for aspherical optics. JSPE Publications Series, 2000, 2000(2): 209–210 (in Japanese)Google Scholar
- 54.Li J, Zhang L, Hong M. Unified theory of error separation techniques-accordance of time and frequency methods. Acta Metrologica Sinica, 2002, 23(3): 164–166Google Scholar
- 58.Kiyono S, Huang P, Fukaya N. Datum introduced by software methods. In: International Conference of Advanced Mechatronics. 1989, 467–72Google Scholar
- 63.Yin Z. Research on ultra-precision measuring straightness and surface micro topography analysis. Dissertation for the Doctoral Degree. Changsha: National University of Defense Technology, 2003 (in Chinese)Google Scholar
- 72.Liang J, Li S, Yang S. Problems and solving methods of on-line measuring straightness. Proceedings of the Society for Photo-Instrumentation Engineers, the International Society for Optical Engineering, 1993, 2101: 1081–1084Google Scholar
- 81.Yin Z, Li S, Chen S, et al. China Patent, CN201410533360.8, 2014-10-11Google Scholar