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Frontiers of Mechanical Engineering

, Volume 12, Issue 1, pp 110–115 | Cite as

Ion beam figuring of continuous phase plates based on the frequency filtering process

  • Mingjin Xu
  • Yifan Dai
  • Xuhui Xie
  • Lin Zhou
  • Shengyi Li
  • Wenqiang Peng
Research Article

Abstract

Ion beam figuring (IBF) technology is an effective technique for fabricating continuous phase plates (CPPs) with small feature structures. This study proposes a multi-pass IBF approach with different beam diameters based on the frequency filtering method to improve the machining accuracy and efficiency of CPPs during IBF. We present the selection principle of the frequency filtering method, which incorporates different removal functions that maximize material removal over the topographical frequencies being imprinted. Large removal functions are used early in the fabrication to figure the surface profile with low frequency. Small removal functions are used to perform final topographical correction with higher frequency and larger surface gradient. A high-precision surface can be obtained as long as the filtering frequency is suitably selected. This method maximizes the high removal efficiency of the large removal function and the high corrective capability of the small removal function. Consequently, the fast convergence of the machining accuracy and efficiency can be achieved.

Keywords

ion beam figuring (IBF) continuous phase plates (CPPs) machining accuracy machining efficiency frequency filtering process 

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Notes

Acknowledgements

We gratefully acknowledge the support of the National Natural Science Foundation of China (Grant Nos. 91323302 and 61505259) and the Program for New Century Excellent Talents in University (NCET-13-0165).

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Copyright information

© Higher Education Press and Springer-Verlag Berlin Heidelberg 2017

Authors and Affiliations

  • Mingjin Xu
    • 1
  • Yifan Dai
    • 1
  • Xuhui Xie
    • 1
  • Lin Zhou
    • 1
  • Shengyi Li
    • 1
  • Wenqiang Peng
    • 2
  1. 1.College of Mechatronics Engineering and AutomationNational University of Defense TechnologyChangshaChina
  2. 2.College of Basic Education for Command OfficerNational University of Defense TechnologyChangshaChina

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