Frontiers of Mechanical Engineering

, Volume 12, Issue 1, pp 33–45 | Cite as

Recent advances in ultrasonic-assisted machining for the fabrication of micro/nano-textured surfaces

  • Shaolin Xu
  • Tsunemoto Kuriyagawa
  • Keita Shimada
  • Masayoshi Mizutani
Open Access
Review Article


In this paper, the state of art of ultrasonic-assisted machining technologies used for fabrication of micro/nano-textured surfaces is reviewed. Diamond machining is the most widely used method in industry for manufacturing precision parts. For fabrication of fine structures on surfaces, conventional diamond machining methods are competitive by considering the precision of structures, but have limitations at machinable structures and machining efficiency, which have been proved to be partly solved by the integration of ultrasonic vibration motion. In this paper, existing ultrasonic-assisted machining methods for fabricating fine surface structures are reviewed and classified, and a rotary ultrasonic texturing (RUT) technology is mainly introduced by presenting the construction of vibration spindles, the texturing principles, and the applications of textured surfaces. Some new ideas and experimental results are presented. Finally, the challenges in using the RUT method to fabricate micro/ nano-textured surfaces are discussed with respect to texturing strategies, machinable structures, and tool wear.


ultrasonic-assisted machining textured surface micro/nano-structures functional performance 



The work was supported by the Grant-in-Aid for Young Scientists (B) (Grant No. 16K17990) from the Japan Society for the Promotion of Science.


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Copyright information

© The Author(s) 2017

Open Access This article is distributed under the terms of the Creative Commons Attribution 4.0 International License (, which permits unrestricted use, distribution, and reproduction in any medium, provided you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made.

Authors and Affiliations

  • Shaolin Xu
    • 1
  • Tsunemoto Kuriyagawa
    • 1
  • Keita Shimada
    • 2
  • Masayoshi Mizutani
    • 2
  1. 1.Division of Biomechanical Engineering, Graduate School of Biomedical EngineeringTohoku UniversitySendaiJapan
  2. 2.Department of Mechanical Systems Engineering, Graduate School of EngineeringTohoku UniversitySendaiJapan

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