Effect of thickness on infrared optical property of VO2 film deposited by magnetron sputtering

Abstract

A series of VO2 films with different thicknesses (from about 25 nm to 250 nm) were prepared on sapphire substrates by radio frequency magnetron sputtering. The deposition times varied from 15 min to 150 min. The metal to insulator transitions (MIT) of the films were studied. The optical transmittance of the films to infrared light (with a wavelength of 4.0 µm) at room temperature (30°C) varied significantly with film thickness, ranging from 86.53% to 41.01%. The modulation property also changes with thickness, decreasing from 22.89% to 14.74%. The phase transition temperature remained approximately 70°C during heating, and approximately 53°C during cooling, despite a tenfold increase in the deposition time, and the resulting thickness of the films. Raman spectroscopy of the films indicated that the intensities of the characteristic peaks corresponding to V2O5 increase with the increasing of film thickness. Temperature-dependent Raman spectroscopy indicated that the peaks corresponding to VO2 undergo reversible changes during heating and cooling of the films, while the peaks corresponding to V2O5 remain unchanged throughout. Careful control of the V2O5 content of the films (by varying the duration of the deposition process) allows control over their transmittance and optical modulation properties without changes in the phase transition temperature. This provides a new method of controlling the optical properties of these materials and shows promise for their potential applications in thermochromic windows.

This is a preview of subscription content, log in to check access.

References

  1. 1

    Wu C, Feng F, Xie Y. Design of vanadium oxide structures with controllable electrical properties for energy applications. Chem Soc Rev, 2013, 42: 5157–5183

    Article  Google Scholar 

  2. 2

    Dai K, Lian J, Miller M J, et al. Optical properties of VO2 thin films deposited on different glass substrates. Opt Mater Express, 2019, 9: 663–672

    Article  Google Scholar 

  3. 3

    Behera M K, Williams L C, Pradhan S K, et al. Reduced transition temperature in Al:ZnO/VO2 based multi-layered device for low powered smart window application. Sci Rep, 2020, 10: 1–11

    Article  Google Scholar 

  4. 4

    Wang M, Bian J, Sun H, et al. n-VO2/p-GaN based nitride-oxide heterostructure with various thickness of VO2 layer grown by MBE. Appl Surf Sci, 2016, 389: 199–204

    Article  Google Scholar 

  5. 5

    Fan L L, Chen S, Wu Y F, et al. Growth and phase transition characteristics of pure M-phase VO2 epitaxial film prepared by oxide molecular beam epitaxy. Appl Phys Lett, 2013, 103: 131914

    Article  Google Scholar 

  6. 6

    Kang C Y, Wei Z F, Zhang C, et al. Evolution of polymorph and photoelectric properties of VO2 thin films with substrate temperature. J Alloys Compd, 2019, 803: 394–400

    Article  Google Scholar 

  7. 7

    Geng C, Zong H, Li M, et al. Influence of the thickness of ZrO2 buffer layer on the electrical and optical properties of VO2 films. Infrared Phys Tech, 2019, 102: 103016

    Article  Google Scholar 

  8. 8

    Lu W, Zhao G, Song B, et al. Preparation and thermochromic properties of sol-gel-derived Zr-doped VO2 films. Surf Coatings Tech, 2017, 320: 311–314

    Article  Google Scholar 

  9. 9

    Liu D, Cheng H, Xing X, et al. Thermochromic properties of W-doped VO2 thin films deposited by aqueous sol-gel method for adaptive infrared stealth application. Infrared Phys Tech, 2016, 77: 339–343

    Article  Google Scholar 

  10. 10

    Huang Y, Zhang D, Liu Y, et al. Phase transition analysis of thermochromic VO2 thin films by temperature-dependent Raman scattering and ellipsometry. Appl Surf Sci, 2018, 456: 545–551

    Article  Google Scholar 

  11. 11

    Zhu M, Wang H, Li C, et al. Thickness-modulated thermochromism of vanadium dioxide thin films grown by magnetron sputtering. Surf Coatings Tech, 2019, 359: 396–402

    Article  Google Scholar 

  12. 12

    Vlček J, Kolenatý D, Houška J, et al. Controlled reactive HiPIMS—Effective technique for low-temperature (300°C) synthesis of VO2 films with semiconductor-to-metal transition. J Phys D-Appl Phys, 2017, 50: 38LT01

    Article  Google Scholar 

  13. 13

    Houska J, Kolenaty D, Vlcek J, et al. Significant improvement of the performance of ZrO2/V1-xWxO2/ZrO2 thermochromic coatings by utilizing a second-order interference. Sol Energy Mater Sol Cells, 2019, 191: 365–371

    Article  Google Scholar 

  14. 14

    Aiempanakit M, Kosum J, Kaewphong T. The influence of post annealing on the structure and optical properties of vanadium oxide thin films. Mater Today-Proc, 2017, 4: 6015–6021

    Article  Google Scholar 

  15. 15

    Maklakov S S, Polozov V I, Maklakov S A, et al. Post-deposition annealing of thin RF magnetron sputter-deposited VO2 films above the melting point. J Alloys Compd, 2018, 763: 558–569

    Article  Google Scholar 

  16. 16

    Wang S, Wei W, Huang T, et al. Al-doping-induced VO2 (B) phase in VO2 (M) toward smart optical thin films with modulated ΔTvis and ΔTc. Adv Eng Mater, 2019: 1900947

  17. 17

    Liu D, Ji H, Peng R, et al. Infrared chameleon-like behavior from VO2 (M) thin films prepared by transformation of metastable VO2(B) for adaptive camouflage in both thermal atmospheric windows. Sol Energy Mater Sol Cells, 2018, 185: 210–217

    Article  Google Scholar 

  18. 18

    Hu K, Yang Y, Hong B, et al. Thickness-dependent anisotropy of metal-insulator transition in (110)-VO2/TiO2 epitaxial thin films. J Alloys Compd, 2017, 699: 575–580

    Article  Google Scholar 

  19. 19

    Beke S. A review of the growth of V2O5 films from 1885 to 2010. Thin Solid Films, 2011, 519: 1761–1771

    Article  Google Scholar 

  20. 20

    Ji Y X, Niklasson G A, Granqvist C G. Durability of VO2-based thin films at elevated temperature: Towards thermochromic fenestration. In: The Proceedings of the 18th International School on Condensed Matter Physics. Varna: IOP Publishing Ltd, 2014. 012005

    Google Scholar 

  21. 21

    Dou Y K, Li J B, Cao M S, et al. Oxidizing annealing effects on VO2 films with different microstructures. Appl Surf Sci, 2015, 345: 232–237

    Article  Google Scholar 

  22. 22

    Lu Q, Bishop S R, Lee D, et al. Electrochemically triggered metal-insulator transition between VO2 and V2O5. Adv Funct Mater, 2018, 28: 1803024

    Article  Google Scholar 

  23. 23

    Shvets P, Dikaya O, Maksimova K, et al. A review of Raman spectroscopy of vanadium oxides. J Raman Spectrosc, 2019, 50: 1226–1244

    Article  Google Scholar 

  24. 24

    Urena-Begara F, Crunteanu A, Raskin J P. Raman and XPS characterization of vanadium oxide thin films with temperature. Appl Surf Sci, 2017, 403: 717–727

    Article  Google Scholar 

  25. 25

    Yang Z, Yang L, Dai B, et al. Evolution of structures and optical properties of vanadium oxides film with temperature deposited by magnetron sputtering. Infrared Phys Tech, 2020, 107: 103302

    Article  Google Scholar 

Download references

Author information

Affiliations

Authors

Corresponding author

Correspondence to JiaQi Zhu.

Additional information

This work was supported by the National Science Fund for Distinguished Young Scholars (Grant No. 51625201), the National Key Research and Development Program of China (Grant No. 2016YFE0201600), the National Natural Science Foundation of China (Grant Nos. 51702066, 51911530123), and the Key Project of the National Natural Science Foundation of China (Grant No. U1809210).

Rights and permissions

Reprints and Permissions

About this article

Verify currency and authenticity via CrossMark

Cite this article

Yang, Z., Yang, Q., Yang, L. et al. Effect of thickness on infrared optical property of VO2 film deposited by magnetron sputtering. Sci. China Technol. Sci. (2020). https://doi.org/10.1007/s11431-020-1656-5

Download citation

Keywords

  • Vanadium dioxide
  • mid-infrared transmittance
  • phase transition temperature
  • magnetron sputtering