Abstract
The metallographic method is used to investigate the structural state of subsurface indium antimonide and arsenide layers under local static elastic stress of varying magnitude and exposure time. It is demonstrated that at low stresses, the concentration of etch figures on the semiconductor surface decreases in the vicinity of the region of stress application, which provides cleaning of a large area from structural defects. At high elastic stresses, the concentration of etch figures increases in the region of stress application. We believe that the examined changes are caused by two opposite mechanisms, namely, a decrease in the defect concentration due to their migration from the region of stress application and an increase in the defect concentration due to their generation in the elastic stress field.
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References
A. V. Voitsehovskii and V. N. Davydov, Photoelectric MIS Structures from Narrow-Band Semiconductor Compounds [in Russian], Radio i Svyaz’, Tomsk (1990).
V. P. Astakhov, V. F. Pasekov, and V. V. Tikhonova, Elektron. Tekhn., Ser. 2, Poluprovodn. Prib., No. 1, 25–27 (1986).
V. G. Litovchenko and V. P. Shapovalov, Mikroelektronika, 17, No. 4, 305–317 (1988).
S. Isomae, H. Tamura, and H. Tsuyama, Appl. Phys. Lett., 36, No. 4, 293–294 (1980).
A. N. Polyakova, Deformation of Semiconductors and Semiconductor Devices [in Russian], Energiya, Moscow (1979).
V. N. Davydov, I. I. Fefelova, and E. A. Loskutova, Izv. Akad. Nauk SSSR, Neorg. Mater., 23, No. 9, 1438–1441 (1987).
V. I. Alekseenko, V. I. Barbashov, L. A. Zil’berman, et al., Ukr. Fiz. Zh., 33, No. 12, 1840–1842 (1988).
V. I. Alekseenko, V. M. Mostovoi, and V. S. Skorokhod, Ukr. Fiz. Zh., 37, No. 2, 237–240 (1992).
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Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Fizika, No. 10, pp. 86–91, October, 2005.
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Davydov, V.N., Belyaev, S.V. & Kokhlov, A.L. Change in the structural state of III–V semiconductor compounds under mechanical stresses. Russ Phys J 48, 1095–1100 (2005). https://doi.org/10.1007/s11182-006-0030-z
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DOI: https://doi.org/10.1007/s11182-006-0030-z