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Russian Microelectronics

, Volume 34, Issue 3, pp 173–180 | Cite as

Square-Membrane Deflection and Stress: Identifying the Validity Range of a Calculation Procedure

  • V. A. Gridchin
  • V. V. Grichenko
  • V. M. Lubimsky
Microelectromechanical Systems

Abstract

The stress, vertical deflection, and nonlinear piezoresistive response of square membranes are measured with the aim of identifying the validity range of a calculation procedure devised in our previous study. Maximum values of the pressure parameter are determined up to which close agreement exists between measured and calculated values.

Keywords

Close Agreement Calculation Procedure Validity Range Pressure Parameter Vertical Deflection 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© MAIK “Nauka/Interperiodica” 2005

Authors and Affiliations

  • V. A. Gridchin
    • 1
  • V. V. Grichenko
    • 1
  • V. M. Lubimsky
    • 1
  1. 1.Novosibirsk State Technical UniversityNovosibirskRussia

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