Russian Microelectronics

, Volume 34, Issue 3, pp 173–180 | Cite as

Square-Membrane Deflection and Stress: Identifying the Validity Range of a Calculation Procedure

  • V. A. Gridchin
  • V. V. Grichenko
  • V. M. Lubimsky
Microelectromechanical Systems


The stress, vertical deflection, and nonlinear piezoresistive response of square membranes are measured with the aim of identifying the validity range of a calculation procedure devised in our previous study. Maximum values of the pressure parameter are determined up to which close agreement exists between measured and calculated values.


Close Agreement Calculation Procedure Validity Range Pressure Parameter Vertical Deflection 
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  1. 1.
    Meier-Scheider, D., Maibach, J., and Obermeier, E., Computer-Aided Characterization of the Elastic Properties of Thin Films, J. Micromech. Microeng., 1992, vol. 2, pp. 173–175.Google Scholar
  2. 2.
    Malhaire, C., Le Berre, M., Febvre, D., Barbier, D., and Pinard, P., Effect of Clamping Conditions and Built-in Stresses on the Thermopneumatic Deflection of SiO2/Si Membranes with Various Geometries, Sens. Actuators, 1999, vol. 74, pp. 174–177.Google Scholar
  3. 3.
    Pancewicz, T., Jechomicz, R., Jniazdomski, Z., Azgin, Z., and Komalski, P., The Empirical Verification of the FEM Model of Semiconductor Pressure Sensors, Sens. Actuators, 1999, vol. 76, pp. 260–265.Google Scholar
  4. 4.
    Chouaf, A., Malhaire, C., Le Berre, M., Dupeux, M., Pourroy, F., and Barbier, D., Stress Analysis at Singular Points of Micromachined Silicon Membranes, Sens. Actuators, 2000, vol. 84, pp. 109–115.Google Scholar
  5. 5.
    Steinmann, R., Friemann, H., Prescher, C., and Shellin, R., Mechanical Behaviour of Micromachined Sensor Membranes under Uniform External Pressure Affected by In-plane Stresses Using a Ritz Method and Hermite Polynomials, Sens. Actuators, A, 1995, vol. 48, pp. 37–46.Google Scholar
  6. 6.
    Gridchin, V.A., Lubimsky, V.M., and Shaporin, A.V., Nonlinear Response of a Rectangular Membrane Sensing Element, Mikroelektronika, 2003, vol. 32, no.4, pp. 294–304.Google Scholar
  7. 7.
    Lubimsky, V.M., Ivanov, V.A., and Shaporin, A.V., Edge Stresses in the Membrane of a Pressure Sensor, in Trudy V mezhdunarodnoi konferentsii “Aktual’nye problemy elektronnogo priborostroeniya” APEP-2000 (Proc. 5th Int. Conf. on Current Issues of Electronic Instrumentation, APEP-2000), Novosibirsk, 2000, vol. 7, pp. 71–79.Google Scholar
  8. 8.
    Gridchin, V.A., Grichenko, V.V., and Lubimsky, V.M., Account and Experimental Researches of Strain in Square Diaphragm, in The Third IEEE-Russia Conference on Microwave Electronics: Measurements, Identification, Application (MEMIA’2001), Novosibirsk, 2001, pp. 127–134.Google Scholar
  9. 9.
    Gridchin, V.A. and Lubimsky, V.M., Phenomenological Model of the Piezoresistive Effect in Polysilicon Films, Mikroelektronika, 2003, vol. 32, no.4, pp. 261–270.Google Scholar
  10. 10.
    Granveaud, M. and Malsan, P., Piezoresistivite d’elements diffuses en silicium, L’Onde Electrique, 1967, vol. 47, pp. 392–401.Google Scholar

Copyright information

© MAIK “Nauka/Interperiodica” 2005

Authors and Affiliations

  • V. A. Gridchin
    • 1
  • V. V. Grichenko
    • 1
  • V. M. Lubimsky
    • 1
  1. 1.Novosibirsk State Technical UniversityNovosibirskRussia

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