Abstract
The stress, vertical deflection, and nonlinear piezoresistive response of square membranes are measured with the aim of identifying the validity range of a calculation procedure devised in our previous study. Maximum values of the pressure parameter are determined up to which close agreement exists between measured and calculated values.
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Translated from Mikroelektronika, Vol. 34, No. 3, 2005, pp. 210–217.
Original Russian Text Copyright © 2005 by Gridchin, Grichenko, Lubimsky.
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Gridchin, V.A., Grichenko, V.V. & Lubimsky, V.M. Square-Membrane Deflection and Stress: Identifying the Validity Range of a Calculation Procedure. Russ Microelectron 34, 173–180 (2005). https://doi.org/10.1007/s11180-005-0026-3
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DOI: https://doi.org/10.1007/s11180-005-0026-3