The paper examines the corrosion behavior of textured polycrystalline and amorphous TiN films in 3% NaCl solution. It is shown that TiN films are oxidized by pitting corrosion. The main cause of corrosion instability of the textured polycrystalline films is interaction with impurities (in particular, oxygen and carbon) that form “clouds” around the grain boundaries. In case of the amorphous–crystalline films, the clouds are observed around associated interfaces. The corrosion resistance of textured polycrystalline films decreases with higher thermal stresses resulting from different coefficients of thermal expansion of the film and substrate. The corrosion resistance of amorphous–crystalline TiN films is about 700 times higher than that of bulk TiN powder material and 2 to 10 times higher than that of textured polycrystalline films.
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References
G. V. Samsonov and I. M. Vinnitskii, Refractory Compounds [in Russian], Metallurgiya, Moscow (1989), p. 560.
L. A. Dvorina and A. S. Dranenko, “Use of refractory compounds in microelectronics,” Powder Metall. Met. Ceram., 39, No. 9–10, 520–523 (2000).
O. S. Dranenko, L. A. Dvorina, and V. M. Talash, Method of Producing Thin Corrosion-Resistant Films [in Ukrainian], Ukrainian Patent 42503 for Utility Model, Inst. Probl. Mater. Science NAN Ukrainy (patent holder), Bulletin No. 13 (2009), p. 54.
A. S. Dranenko, V. A. Lavrenko, and V. N. Talash, “Corrosion resistance of nanostructured TiB2 films in 3% NACl solution,” Power Metall. Met. Ceram., 49, No. 3–4, 174–178 (2010).
O. Kalakhan, V. Matseviyi, I. Kazak, et al., “Corrosion electrochemical behavior of plasma vacuum and magnetron TiN coatings on steel 20Kh13 in various corrosion media,” Fiz. Khim. Mekh. Mater., No. 8, 276–280 (2010).
N. Anufriev, “Use of electrochemical methods for determining the protective properties of tungsten carbide and titanium nitride coatings on steel,” Fiz. Khim. Mekh. Mater., No. 8, 676–680 (2008).
L. I. Mirkin, Handbook on X-Ray Analysis of Polycrystals [in Russian], Gosfizmat, Moscow (1961), p. 875.
Jia-Hong Huang, Kae-Jy Yu, P. Sit, and Ge-Ping Yu, “Heat treatment of nanocrystalline TiN films deposited by unbalanced magnetron sputtering,” Surf. Coat. Technol., No. 200, 4291–4299 (2006).
P. I. Baranskii, V. P. Klochkov, and I. V. Potykevich, Semiconductor Electronics, Properties of Materials: Handbook [in Russian], Naukova Dumka, Kiev (1975), p. 704.
R. A. Andrievskii and I. P. Spivak, Strength of Refractory Compounds and Associated Materials: Handbook [in Russian], Metallurgiya, Chelyabinsk (1989), p. 368.
V. M. Talash, “Forming protective oxide nanofilms on titanium carbide, nitride, boride, and silicide surfaces,” Dop. NAN Ukrainy, No. 1, 76–80 (2011).
J. Friedel, Dislocations [Russian translation], Mir, Moscow (1967), p. 643.
U. R. Evans, The Corrosion and Oxidation of Metals, Edward Arnold Publishers Ltd., London (1960).
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Translated from Poroshkovaya Metallurgiya, Vol. 52, No. 3–4 (490), pp. 132–138, 2013.
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Dranenko, A.S., Lavrenko, V.A. & Talash, V.N. Corrosion resistance of TiN films in 3% NaCl solution. Powder Metall Met Ceram 52, 223–227 (2013). https://doi.org/10.1007/s11106-013-9516-8
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DOI: https://doi.org/10.1007/s11106-013-9516-8