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Plasma Chemistry and Plasma Processing

, Volume 32, Issue 2, pp 231–248 | Cite as

Dissociative Excitation of C2H2 in the Electron Cyclotron Resonance Plasma of Ar: Production of CH(A2Δ) Radicals and Formation of Hydrogenated Amorphous Carbon Films

  • Haruhiko Ito
  • Katsuaki Koshimura
  • Saori Onitsuka
  • Kohtaro Okada
  • Tsuneo Suzuki
  • Hiroki Akasaka
  • Hidetoshi Saitoh
Original Paper

Abstract

The dissociative excitation reaction of C2H2 with the electron-cyclotron resonance plasma of Ar was investigated based on the electrostatic-probe measurements and on the optical emission spectroscopy of the CH(A2Δ–X2Π) transition. The density, n e, and the temperature, T e, of free electrons were controlled by adding H2O molecules externally into the reaction region, and the dependence of the CH(A2Δ–X2Π) emission intensity on the addition of H2O was observed to compare with the evaluated dependencies based on n e and T e. The mechanism of production of CH(A2Δ) was found, predominantly, to be the electron impact with the contribution of 10–20% of the electron-impact dissociation of C2H radicals; the contribution of the ion–electron recombination was negligible. Hydrogenated amorphous carbon films were fabricated using the same reaction system. The atomic compositions, Raman spectra, and the hardness of films were discussed in terms of the variations of n e and T e upon the addition of H2O molecules.

Keywords

ECR plasma Optical emission spectrum C2H2 CH(A–X) transition Hydrogenated amorphous carbon 

Notes

Acknowledgments

The authors thank to Professor Kozo Kuchitsu for his interest in the present study and fruitful advice and discussion. They thank also to Professor Hiroshi Matsubara for his kind provision to use the XPS apparatus. This work was supported by Grant-in-Aid for Scientific Research, from the Ministry of Education, Culture, Sports, Science, and Technology, under Contract No. 22560020.

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Copyright information

© Springer Science+Business Media, LLC 2012

Authors and Affiliations

  • Haruhiko Ito
    • 1
  • Katsuaki Koshimura
    • 1
  • Saori Onitsuka
    • 1
  • Kohtaro Okada
    • 1
  • Tsuneo Suzuki
    • 2
  • Hiroki Akasaka
    • 1
  • Hidetoshi Saitoh
    • 1
  1. 1.Department of ChemistryNagaoka University of TechnologyNagaokaJapan
  2. 2.Extreme Energy-Density Research InstituteNagaoka University of TechnologyNagaokaJapan

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