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Plasma Chemistry and Plasma Processing

, Volume 31, Issue 4, pp 585–594 | Cite as

Removal of C3F8 Via the Combination of Non-Thermal Plasma, Adsorption and Catalysis

  • Bor Yuan Lin
  • Moo Been Chang
  • Hsin Liang Chen
  • How Ming Lee
  • Sheng Jen Yu
  • Shou Nan Li
Original Paper

Abstract

The feasibility of C3F8 abatement via combining nonthermal plasma with adsorption and/or catalysis is investigated in this study. In terms of the simultaneous combination of plasma, adsorption and catalysis (CPAC), three different configurations including A/C layer (adsorbent layer prior to catalyst layer), C/A layer (catalyst layer prior to adsorbent layer) and A/C mixture (adsorbent and catalyst are mechanically mixed) are adopted. For all the experimental tests conducted in this study, the gas stream consists of 500 ppm C3F8, 2% O2, and balanced N2. The experimental results indicate that C3F8 removal efficiencies depend on what kind of packing material is adopted (adsorbent, catalyst or both) and how the material is packed within the plasma reactor. The removal efficiencies obtained with different reactors are in the order as: CPAC (A/C layer; AC mixture) > CPA (plasma with adsorbent alone) > CPC (plasma with catalyst alone) > CPAC (C/A layer). The indentified products after treatment include CO2, CO, N2O and CF4. The formation of C2F6 is not observed in this study, which is encouraging since the global warming potential of C2F6 is actually higher than that of C3F8.

Keywords

Global warming Greenhouse gases (GHGs) Perfluorocompounds (PFCs) Plasma catalysis Adsorbent 

Notes

Acknowledgments

The authors gratefully acknowledge the financial support provided by Industrial Technology Research Institute of Taiwan (grant number 985914).

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Copyright information

© Springer Science+Business Media, LLC 2011

Authors and Affiliations

  • Bor Yuan Lin
    • 1
  • Moo Been Chang
    • 1
  • Hsin Liang Chen
    • 2
  • How Ming Lee
    • 2
  • Sheng Jen Yu
    • 3
  • Shou Nan Li
    • 3
  1. 1.Graduate Institute of Environmental EngineeringNational Central UniversityChung-Li, Taoyuan CountyTaiwan, ROC
  2. 2.Physics DivisionInstitute of Nuclear Energy Research (INER)Longtan, Taoyuan CountyTaiwan, ROC
  3. 3.Industrial Technology Research Institute (ITRI)HsinchuTaiwan, ROC

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