Erratum to: Thin Film Growth of Germanium Selenides from PECVD of GeCl4 and Dimethyl Selenide
Erratum to: Plasma Chem Plasma Process DOI 10.1007/s11090-010-9278-8
In the online published article, it was neglected to note that the flow rates listed in the Table 1 for the DMSe flow were based on a nitrogen flow controller.
The nitrogen to DMSe flow rate conversion factor was not available for the MKS flow controller that was used. A conversion factor of 0.34 from a different flow controller manufacturer was recently found. The actual DMSe flow rate may be approximated by multiplying the table entry by 0.34. Thus for a flow rate of 5 sccm listed in the table for DMSe, the true flow rate is likely close to (0.34) × 5 sccm = 1.7 sccm.