Properties of SnO2:Sb films produced on flexible organic substrates by droplet-free pulsed laser deposition method
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The thin SnO2:Sb films have been produced on flexible organic polyethyleneterephthalate substrates of room temperature by the droplet-free pulsed laser deposition method. Their optical and electric properties have been investigated. It has been established that energy density on the target influences the conductivity and transmission of the SnO2:Sb films. The optimum conditions of film production at the room temperature have been determined. The minimum resistivity of the produced films (ρ ~ 5 × 10−3 Ohm cm) was observed at the energy density of 5 J/cm2 on the target and at the oxygen pressure of 20 mTorr in the vacuum chamber during the deposition. The application of post-growth laser annealing at the energy density on the film from 20 to 40 mJ/cm2 for thin SnO2:Sb films produced under various conditions of deposition causes a 5 to 20 times decrease in the resistivity of the low-resistance SnO2:Sb films, and a 300 times decrease in the resistivity of high-resistance ones.
KeywordsDroplet-free pulsed laser deposition High-conductivity thin films Flexible organic substrates
This work has been supported by the grants of the Russian Foundation for Basic Research Nos. 14-07-00408, 14-07-00688, 14-47-03605, 15-38-20369, 15-29-01171, 15-07-03580, 15-07-03331, 16-29-05385, 16-07-00842.
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