Abstract
Crystalline semiconductor nanomembranes (NMs), which are transferable, stackable, bondable and manufacturable, offer unprecedented opportunities for unique and novel device applications. We review here nanophotonic devices based on stacked semiconductor NMs on Si, glass and flexible PET substrates. Photonic crystal Fano resonance-based surface-normal optical filters and broadband reflectors have been demonstrated with unique angle and polarization properties. Flexible photodetectors and solar cells have also been developed based on the NM stacking processes. Such NM stacking process can lead to a paradigm shift on silicon photonic integration and hybrid organic/inorganic flexible photonics.
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Bowers J.E., Park H., Fang A.W., Cohen O., Jones R., Paniccia M.: Design and fabrication of optically pumped hybrid silicon-AlGaInAs evanescent lasers. IEEE J. Sel. Top. Quant. Electron. 12(2), 1657–1663 (2006)
Kim D., Ahn J., Choi W., Kim H., Kim T., Song J., Huang Y., Liu Z., Lu C., Rogers J.: Stretchable and foldable silicon integrated circuits. Science 320(5875), 507–511 (2008a)
Kim D., Song J., Choi W., Kim H., Kim R., Liu Z., Huang Y., Hwang K., Zhang Y., Rogers J.: Materials and noncoplanar mesh designs for integrated circuits with linear elastic responses to extreme mechanical deformations. Proc. Natl. Acad. Sci. USA 105(48), 18675–18680 (2008b)
Mack S., Meitl M.A., Baca A.J., Zhu Z.T., Rogers J.A.: Mechanically flexible thin-film transistors that use ultrathin ribbons of silicon derived from bulk wafers. Appl. Phys. Lett. 88, 213101 (2006)
Meitl M.A., Zhu Z.T., Kumar V., Lee K.J., Feng X., Huang Y.Y., Adesida I., Nuzzo R.G., Rogers J.A.: Transfer printing by kinetic control of adhesion to an elastomeric stamp. Nat. Mater. 5(1), 33–38 (2006)
Park H., Fang A., Kodama S., Bowers J.: Hybrid silicon evanescent laser fabricated with a silicon waveguide and III-V offset quantum wells. Opt. Express 13(23), 9460–9464 (2005)
Qiang Z., Yang H., Chen L., Pang H., Ma Z., Zhou W.: Fano filters based on transferred silicon nanomembranes on plastic substrates. Appl. Phys. Lett. 93, 061106 (2008)
Roberts M.M., Klein L.J., Savage D.E., Slinker K.A., Friesen M., Celler G., Eriksson M.A., Lagally M.G.: Elastically relaxed free-standing strained-silicon nanomembranes. Nat. Mater. 5(5), 388–393 (2006)
Rogers J., Bao Z., Baldwin K., Dodabalapur A., Crone B., Raju V., Kuck V., Katz H., Amundson K., Ewing J.: Paper-like electronic displays: large-area rubber-stamped plastic sheets of electronics and microencapsulated electrophoretic inks. Proc. Natl. Acad. Sci. USA 98(9), 4835–4840 (2001)
Rogers J., Huang Y.: A curvy, stretchy future for electronics. Proc. Natl. Acad. Sci. USA 106(27), 10875–10876 (2009)
Schmidt O.G., Eberl K.: Nanotechnology: thin solid films roll up into nanotubes. Nature 410(6825), 168 (2001)
Scott S.A., Lagally M.G.: Elastically strain-sharing nanomembranes: flexible and transferable strained silicon and silicon–germanium alloys. J. Phy. D Appl. Phys 40(4), R75–R92 (2007)
Sun Y., Rogers J.A.: Inorganic semiconductors for flexible electronics. Adv. Mater. 19, 1897–1916 (2007)
Yang H., Chuwongin S., Qiang Z., Chen L., Pang H., Ma Z., Zhou W.: Resonance control of membrane reflectors with effective index engineering. Appl. Phys. Lett. 95, 023110 (2009)
Yang H., Qiang Z., Pang H., Ma Z., Zhou W.D.: Surface-normal fano filters based on transferred silicon nanomembranes on glass substrates. Electron. Lett. 44(14), 858–859 (2008)
Yang W., Yang H., Qin G., Ma Z., Berggren J., Hammar M., Soref R., Zhou W.: Large-area InP-based crystalline nanomembrane flexible photodetectors. Appl. Phys. Lett. 96(12), 121107 (2010)
Yuan H.-C., Shin J., Qin G., Sun L., Bhattacharya P., Lagally M.G., Celler G.K., Ma Z.: Flexible photodetectors on plastic substrates by use of printing transferred single-crystal germanium membranes. Appl. Phys. Lett. 94(1), 013102 (2009)
Yuan H.C., Celler G.K., Ma Z.: 7.8-GHz flexible thin-film transistors on a low-temperature plastic substrate. J. Appl. Phys. 102, 034501 (2007)
Yuan H.C., Ma Z.: Microwave thin-film transistors using Si nanomembranes on flexible polymer substrate. Appl. Phys. Lett. 89, 212105 (2006)
Yuan H.C., Ma Z., Roberts M.M., Savage D.E., Lagally M.G.: High-speed strained-single-crystal-silicon thin-film transistors on flexible polymers. J. Appl. Phys. 100, 013708 (2006)
Yuan, H.C., Roberts, M.M., Zhang, P., Park, B.N., Klein, L.J., Savage, D.E., Flack, F.S., Ma, Z., Evans, P.G., Eriksson, M.A.: Silicon-based nanomembrane materials: the ultimate in strain engineering. In: Digest of Papers 2005 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems, pp. 327–333. (2005)
Zhang P., Tevaarwerk E., Park B., Savage D., Celler G., Knezevic I., Evans P., Eriksson M., Lagally M.: Electronic transport in nanometre-scale silicon-on-insulator membranes. Nature 439(7077), 703–706 (2006)
Zhou, W., Ma, Z.: Semiconductor nanomembranes for stacked and flexible photonics (Invited). Paper presented at the Photonics West, San Jose (2010)
Zhou W., Ma Z., Yang H., Qiang Z., Qin G., Pang H., Chen L., Yang W., Chuwongin S., Zhao D.: Flexible photonic-crystal Fano filters based on transferred semiconductor nanomembranes. J. Phys. D 42(23), 234007–234017 (2009)
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Zhou, W., Ma, Z., Chuwongin, S. et al. Semiconductor nanomembranes for integrated silicon photonics and flexible Photonics. Opt Quant Electron 44, 605–611 (2012). https://doi.org/10.1007/s11082-012-9586-8
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DOI: https://doi.org/10.1007/s11082-012-9586-8