Abstract
Vertical micro-holes were fabricated inside a photosensitive glass (FOTURAN) by focused femtosecond laser (λ = 775 nm) writing, followed by heat treatment and wet chemical etching in 8% hydrofluoric acid solution for 50 min. The micro-holes were analyzed by optical and scanning electron microscopy, and was found they own circular cross-section and clear edge. At present, micro-holes with aspect ratio of about 7 is achieved. By varying the incident laser fluence in a range of 2.3–36.2 J/cm2 and the laser writing velocity in 100–1000 μm/s, the influences of femtosecond laser parameters on the formation of micro-holes are characterized as that: writing velocities hardly affect the micro-hole diameter, while relatively lower laser fluences result in smaller diameter, and the cross-section is more circular in this case. The possible reason for this phenomenon is discussed.
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Wu, Y., Jia, W., Wang, Cy. et al. Micro-hole fabricated inside FOTURAN glass using femtosecond laser writing and chemical etching. Opt Quant Electron 39, 1223–1229 (2007). https://doi.org/10.1007/s11082-008-9192-y
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DOI: https://doi.org/10.1007/s11082-008-9192-y