Abstract
Phonon scattering at layer boundaries reducing efficiency of heat extraction from volumes of modern multi-layered electronic devices is believed to be one of the most important obstacles to their further miniaturization. Therefore the main goal of this work is to examine theoretically thermal conductivities of thin semiconductor layers as a function of their thickness using, as a typical example, the GaAs layer between two AlAs or (AlGa)As layers. Applicability of various possible theoretical approaches to a heat transport in such a structure is discussed. However, theory of the nanoscale thermal transport has been found to be still at an immature stage. Nevertheless, following the phonon-radiative-transfer approach of Chen and Tien derived from the Boltzmann transport equation, the RT (=300 K) GaAs thermal conductivity has been found to be dramatically reduced from its bulk value of 44 W/mK, to only 1.05 W/mK for the 20-nm layer and even to 0.15 W/mK for 2-nm layer, which is in a general agreement with experimental results. However, this approach has happened to give distinctly incorrect results for relatively small composition changes of successive layers. Then reasonable values of effective thermal conductivities should be extracted from thermal conductivities determined experimentally for similar devices.
Similar content being viewed by others
References
Amith A., Kudman I. and Steigmeier E.F. (1965). Electron and phonon scattering in GaAs at high temperatures. Phys. Rev. 138: A1270–A1276
Berman R., Foster E.L. and Ziman J.M. (1955). Thermal conduction in artificial sapphire crystals at low temperatures. Proc. Roy. Soc. A (London) 231: 130–144
Bies W.E., Radtke R.J. and Ehrenreich H. (2000). Phonon dispersion effects and the thermal conductivity reduction in GaAs/AlAs superlattices. J. Appl. Phys. 88: 1498–1503
Borca-Tasciuc T., Song T.W., Meyer J.R., Vurgaftman I., Yang M.-J., Nosho B.Z., Whitman L.J., Lee H., Martinelli R.U., Turner G.W., Manfra M.J. and Chen G. (2002). Thermal conductivity of AlAs0.07Sb0.93 and Al0.9Ga0.1As0.07Sb0.93 alloys and (AlAs)1/(AlSb)11 digital-alloy superlattices. J. Appl. Phys. 92: 4994–4998
Cahill D.G., Ford W.K., Goodson K.E., Mahan G.D., Majumdar A., Maris H.J., Merlin R and Phillpot S.R. (2003). Nanoscale thermal transport. J. Appl. Phys. 93: 793–818
Callaway J. (1959). Model of lattice thermal conductivity at low temperature. Phys. Rev. 113: 1046–1051
Capinski W.S., Cardona M., Katzer D.S., Maris H.J., Ploog K. and Ruf T. (1999b). Thermal conductivity of GaAs/AlAs superlattices. Physica B 263–264: 530–532
Capinski W.S. and Maris H.J. (1996). Thermal conductivity of GaAs/AlAs superlattices. Physica B 219&220: 699–701
Capinski W.S., Maris H.J., Ruf T., Cardona M., Ploog K. and Katzer D.S. (1999a). Thermal-conductivity measurements of GaAs/AlAs superlattices using a picosecond optical pump-and-probe technique. Phys. Rev. B 59: 8105–8113
Casimir H.B.G. (1938). Note on the conduction of heat in crystals. Physica 5: 495–500
Cattaneo C. (1958). C. R. Acad. Sci. 247: 431
Chen G. (1997). Size and interface effects on thermal conductivity of superlattices and periodic thin-film structures. J. Heat Transfer 119: 220–229
Chen G. (1998). Thermal conductivity and ballistic-phonon transport in the cross-plane direction of superlattices. Phys. Rev. B 57: 14958–14973
Chen G. (2000). Particularities of heat conduction in nanostractures. J. Nanoparticle Res. 2: 199–204
Chen G. (2001). Ballistic-diffusive heat conduction equation. Phys. Rev. Lett. 86: 2297–2300
Chen G. (2002). Ballistic-diffusive equations for transient heat conduction from nano to macroscales. J. Heat Transfer 124: 320–328
Chen G. and Neagu M. (1997). Thermal conductivity and heat transfer in superlattices. Appl. Phys. Lett. 71: 2761–2763
Chen G. and Tien C.L. (1993). Thermal conductivities of quantum well structures. J. Thermophys. Heat Transfer 7: 311–318
Daly B.C. and Maris H.J. (2002). Calculation of the thermal conductivity of superlattices by molecular dynamics simulation. Physica B 316–317: 247–249
Escobar R.A., Ghai S.S., Jhon M.S. and Amon C.H. (2006). Multi-length and time scale thermal transport using the lattice Boltzmann method with application to electronics cooling. Int. J. Heat Mass Transfer 49: 97–107
Flik M.I., Choi B.I. and Goodson K.E. (1992). Heat transfer regimes in microstructures. J. Heat Transfer 114: 666–674
Flik M.I. and Tien C.L. (1990). Size effect on the thermal conductivity of high-Tc thin film superconductors. J. Heat Transfer 112: 872–881
Holland M.G. (1963). Analysis of lattice thermal conductivity. Phys. Rev. 132: 2461–2471
Holland M.G. (1964). Phonon scattering in semiconductors from thermal conductivity studies. Phys. Rev. 134: A471–A480
Joseph D.D. and Preziosi L. (1989). Heat waves. Rev. Mod. Phys. 61: 41–53
Joseph D.D. and Preziosi L. (1990). Heat waves. Rev. Mod. Phys. 62: 375–391
Joshi A.A. and Majumdar A. (1993). Transient ballistic and diffusive phonon heat transport in thin films. J. Appl. Phys. 74: 31–39
Ju Y.S. and Goodson K.E. (1999). Phononscattering in silicon films with thickness of order 100 nm. Appl. Phys. Lett. 74: 3005–3007
Klitsner T., VanCleve J.E., Fisher H.E. and Pohl R.O. (1988). Phonon radiative heat transfer and surface scattering. Phys. Rev. B 38: 7576–7594
Lambropoulos J.C., Jolly M.R., Amsden C.A., Gilman S.E., Sinisropi M.J., Diakomihalis D. and Jacobs S.D. (1989). Thermal conductivity of dielectric thin films. J. Appl. Phys. 66: 4230–4242
Lee S.-M., Cahill D.G. and Venkatasubramanian R. (1997). Thermal conductivity of Si–Ge superlattices. Appl. Phys. Lett. 70: 2957–2959
Liang L.H. and Li B. (2006). Size-dependent thermal conductivity of nanoscale semiconducting systems. Phys. Rev. B 73: 153303
Majumdar A. (1991a). Microscale heat conduction in dielectric thin films. ASME HTD 184: 34–41
Majumdar A. (1991b). Effect of interfacial roughness on phonon radiative heat conduction. J. Heat Transfer 113: 797–805
Majumdar A. (1993). Microscale heat conduction in dielectric thin films. J. Heat Transfer 115: 7–16
Murthy J.Y., Narumanchi S.V.J., Pascual-Gutierrez J.A., Wang T., Ni Ch. and Mathur S.R. (2005). Review of multi-scale simulation in sub-micron heat transfer. Int. J. Multiscale Comput. Eng. 3: 5–32
Narayanamuri V., Störmer H.L., Chin M.A., Gossard A.C. and Wiegmann W. (1979). Selective transmission of high-frequency phonons by a superlattice: the ‘dielectric phonon filter. Phys. Rev. Lett. 43: 2012–2016
Norris P.M., Chen G. and Tien Ch.-L. (1994). Size effects on the temperature rise in vertical-cavity surface-emitting laser diodes. Int. J. Heat Mass Transfer 37(Suppl. 1): 9–17
Piprek J., Tröger T., Schröter B., Kolodzey J. and Ih C.S. (1998). Thermal conductivity reduction in GaAs–AlAs distributed Bragg reflectors. IEEE Photon. Technol. Lett. 10: 81–83
Ren S.Y. and Dow J.D. (1982). Thermal conductivity of superlattice. Phys. Rev. B 25: 3750–3755
Ridley B.K. (1997). Electrons and Phonons in Semiconductor Multilayers. Cambridge University Press, Cambridge
Shelling P.K. and Phillpot S.R. (2003). Multiscale simulation of phonon transport in superlattices. J. Appl. Phys. 93: 5377–5387
Simkin M.V. and Mahan G.D. (2000). Minimum thermal conductivity of superlattices. Phys. Rev. Lett. 84: 927–930
Swartz E.T. and Pohl R.O. (1989). Thermal boundary resistance. Rev. Modern Phys. 61: 605–668
Touzelbaev M.N., Zhou P., Venkatasubramanian R. and Goodson K.E. (2001). Thermal characterization of Bi2Te3/Sb2Te3 superlattices. J. Appl. Phys. 90: 763–767
Yao T. (1987). Thermal properties of AlAs/GaAs superlattices. Appl. Phys. Lett. 51: 1798–1800
Yu X.Y., Chen G., Verma A. and Smith J.S. (1995). Temperature dependence of thermophysical properties of GaAs/AlAs periodic structure. Appl. Phys. Lett. 67: 3554–3556
Ziman J.M. (1960). Electrons and Phonons. Clarendon, Oxford
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Gęsikowska, E., Nakwaski, W. An impact of multi-layered structures of modern optoelectronic devices on their thermal properties. Opt Quant Electron 40, 205–216 (2008). https://doi.org/10.1007/s11082-007-9151-z
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s11082-007-9151-z