Nonlinear Dynamics

, Volume 92, Issue 1, pp 59–74 | Cite as

Modeling and closed loop control of a polymer composite-based hard-magnetic micromirror for optical switching applications

  • Yi Qin
  • Weijie Sun
  • Peng Zuo
  • John T. W. Yeow
Original Paper


In this paper, a mathematical model is first established for an electromagnetic actuated polymer composite-based MEMS hard-magnetic micromirror. The model consists of the analyses of the mechanical parts for torsional scanner, the electro-coils parts and the magnetic actuator parts of the hard-magnetic films. To illustrate the effectiveness of such a model, the static and dynamic performance is further analyzed using both finite element method and it is experimentally validated. The experimental results show that our models are valid. Finally, considering the high performance requirements of optical switching applications proportional-integral-derivative (PID) controller with incomplete differentials and the integral sliding mode surface with PID form controller which is based on the established mathematical model is designed to improve its transient response. And the experimental results of set-point regulation have demonstrated that the 95% setting time is shortened from 45 to 10 ms while improving the overshoot.


MEMS Electromagnetic micromirror Hard-magnetic PID Sliding mode control Angle tracking 



This work is supported by National Natural Science Foundation (NNSF) of China under Grants 61273121, 61374036 and Science and Technology Project of Guangdong Province (No. 2017A010101009).


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Copyright information

© Springer Science+Business Media B.V. 2017

Authors and Affiliations

  • Yi Qin
    • 1
  • Weijie Sun
    • 1
  • Peng Zuo
    • 1
  • John T. W. Yeow
    • 2
  1. 1.College of Automation Science and EngineeringSouth China University of TechnologyGuangzhouPeople’s Republic of China
  2. 2.Systems Design EngineeringUniversity of WaterlooWaterlooCanada

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