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Journal of Nanoparticle Research

, Volume 13, Issue 10, pp 4821–4828 | Cite as

Low-temperature formation of nanocrystalline SiC particles and composite from three-layer Si/C/Si film for the novel enhanced white photoluminescence

  • C. K. Chung
  • T. Y. Chen
  • C. W. Lai
Research Paper

Abstract

In this article, nanocrystalline silicon carbide (nc-SiC) and composite have been synthesized at an annealing temperature as low as 750 °C through the thermal reaction of Si/C/Si multilayers deposited on the Si(100) substrate by ultra-high-vacuum ion beam sputtering (UHV IBS) compared with the conventional thermal formation of crystalline SiC (c-SiC) nanostructures above 1,000 °C. The evolution of microstructure and reaction between C and Si was examined by Raman spectroscopy, Fourier transform infrared spectrometer (FTIR), high-resolution field emission scanning electron microscope (HR-FESEM), and high-resolution transmission electron microscopy. The c-SiC nanoparticles (np-SiC) of around 20–120 nm in diameter appeared on the top and bottom of the three-layer film with a particle density of around 2.63 × 1010 cm−2 after 750 °C annealing. The composite of nc-SiC and Si nanocrystals (nc-Si) size below 5 nm embedded in an amorphous SiC (a-SiC) matrix appeared at the interface between the Si and C layers. Efficient thermal energy is the driving force for the formation of nc-SiC and composite through interdiffusion between C and Si. The broad visible photoluminescence (PL) spectrum of 350–750 nm can be obtained from the annealed composite Si/C/Si multilayer and deconvoluted into four bands of blue (~430 nm), green (~500 nm), green–yellow (~550 nm), and orange (~640 nm) emission, corresponding to the emission origins from nc-SiC, sp2 carbon clusters, np-SiC, and nc-Si, respectively.

Keywords

nc-SiC Nanoparticles Composite RTA Photoluminescence Nanolayers 

Notes

Acknowledgments

This study is partially sponsored by the National Science Council under grant No. NSC 96-2628-E-006-080-MY3. The authors would like to thank the Center for Micro/Nano Science and Technology (CMNST) in the National Cheng Kung University, Tainan, Taiwan, for the access of analysis equipments and technical support.

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Copyright information

© Springer Science+Business Media B.V. 2011

Authors and Affiliations

  1. 1.Department of Mechanical Engineering, Center for Micro/Nano Science and Technology, and Advanced Optoelectronic Technology CenterNational Cheng Kung UniversityTainanTaiwan, Republic of China

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