We propose a method for measuring the micrometer-range thicknesses of thin films with the use of acoustic waves. The method is based on the use of the nonlinear dependence of antisymmetric harmonic Lamb waves on the thickness of the tested material. The errors of measurements of the thickness of thin films are analyzed with the help of a contactless electromagnetoacoustic transducer of acoustic waves.
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References
Z. Yu. Gotra, Monitoring of the Technology of Hybrid Integrated Circuits, Kamenyar, Lvov (1981).
L. I. Maissel and R. Glang (eds.), Handbook of Thin Film Technology [Russian translation], Sov. Radio, Moscow (1977).
M. V. Korolev, Echo-Pulse Thickness Meters, Mashinostroenie, Moscow (1980).
I. A. Viktorov, Physical Foundations of the Application of Ultrasound Rayleigh and Lamb Waves in Engineering, Nauka, Moscow (1966).
Kh. B. Tolipov, D. G. Kleshchev, and V. M. Berezin, “Application of Lamb waves for measuring the thickness of thin metallic films,” Pribory Tekhn. Eksperim., No. 2, 137–139 (2017).
Kh. Tolipov, “Stagnant nonuniform acoustic waves,” Adv. Mater. Res., 684, 667–670 (2013), DOI: https://doi.org/10.4028/www. scientific.net/AMR.684.667.
Kh. B. Tolipov, “Possibilities of increasing the efficiency of contactless emitters of acoustic waves,” Defektoskopiya, No. 4, 71–74 (2017).
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Translated from Izmeritel’naya Tekhnika, No. 6, pp. 70–72, June, 2018.
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Tolipov, K.B. Measuring of the Thickness of Thin Films with the Use of Harmonic Antisymmetric Lamb Waves. Meas Tech 61, 639–642 (2018). https://doi.org/10.1007/s11018-018-1477-3
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DOI: https://doi.org/10.1007/s11018-018-1477-3