Experimental Study of Metrological Characteristics of the Automated Interferometric System for Measuring the Surface Shape of Diffusely Reflecting Objects

  • E. E. Maiorov
  • V. T. Prokopenko
  • A. Ch. Mashek
  • G. A. Tsygankova
  • A. V. Kurlov
  • M. V. Khokhlova
  • D. I. Kirik
  • D. D. Kapralov
Article
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The metrological characteristics of an automated interferometric system for measuring the surface shape of diffusely reflecting objects have been experimentally studied. Changes in the amplitude of the output signal during modulation of the optical path difference were studied and visualization of the effect of introduced interference on the measurement error was made. It is established that as the angle of incidence of optical radiation increases, the duration of the interference signal increases and, correspondingly, the measurement error of the automated interferometric system. The dependence of the measurement range on the scanning frequency of the reference mirror is obtained. The measurement error of an automated interferometric system under normal illumination does not exceed 0.67 μm.

Keywords

interferometer partially coherent source coherence length diffusely reflecting object decorrelated speckle field contrast of interference field diffraction grating 

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Copyright information

© Springer Science+Business Media, LLC, part of Springer Nature 2018

Authors and Affiliations

  • E. E. Maiorov
    • 1
  • V. T. Prokopenko
    • 2
  • A. Ch. Mashek
    • 3
  • G. A. Tsygankova
    • 3
  • A. V. Kurlov
    • 4
  • M. V. Khokhlova
    • 5
  • D. I. Kirik
    • 6
  • D. D. Kapralov
    • 6
  1. 1.St. Petersburg University of Management and Economics TechnologiesSt. PetersburgRussia
  2. 2.St. Petersburg National Research University of Information TechnologiesMechanics, and Optics (ITMO)St. PetersburgRussia
  3. 3.Naval Polytechnic InstitutePushkinRussia
  4. 4.St. Petersburg State University of Aerospace InstrumentationSt. PetersburgRussia
  5. 5.Mozhaisky Military Space AcademySt. PetersburgRussia
  6. 6.Bonch-Bruevich St. Petersburg State University of TelecommunicationsSt. PetersburgRussia

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