We propose an electron-probe method for measuring thickness nonuniformity in nanofilms, using the dependence of the ratio of the intensities of the characteristic x-ray film elements on its thickness. The calibration dependence is computed simulating the interaction of electrons with the sample by a Monte-Carlo method.
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Translated from Izmeritelnaya Tekhnika, No. 8, pp. 24–26, August, 2016.
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Darznek, S.A., Kuzin, A.Y., Mityukhlyaev, V.B. et al. Measurement of the Thickness Nonuniformity of Nanofilms Using an Electron Probe Method. Meas Tech 59, 822–825 (2016). https://doi.org/10.1007/s11018-016-1051-9
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DOI: https://doi.org/10.1007/s11018-016-1051-9