Comparator Principle in Precision Devices for Spatial Measurements
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A comparative analysis of different methods of implementing a Cartesian coordinate system in devices used for spatial measurements is presented. Possible ways of decreasing the error of reproduction of the coordinate axes are demonstrated. The structure of the assembly of coordinate displacements along with the selection of the transducers is analyzed.
Keywordscoordinates comparator structure guides interferometer raster interpolator
- 1.I. Shakhnovich, “Technology of a 45 nm level: 45 or 32, any further?” Elektronika, No. 2, 102–109 (2008).Google Scholar
- 2.A. A. Gapshis, A. Yu. Kasparaytis, M. B. Modestov, et al., Coordinate Measurement Machines and Their Applications, Mashinostroenie, Moscow (1988).Google Scholar
- 3.Ye. V. Polyakov, E. S. Ginzburg, I. I. Kanaev, et al., “Implementation of Abbe’s principle in the reconstructed Fantaziya measurement machine,” www.myshared.ru/slid/671387, accessed Aug. 28, 2014.
- 4.Ye. Ye. Onegin, Precise Machine Design for Microelectronics, Radio i Svyaz, Moscow (1986).Google Scholar
- 5.Yu. B. Kolyada, Inventor’s Certificate 262401 USSR, “A device for the measurement of coordinates,” Byull. Izobret., No. 6 (1970).Google Scholar
- 6.L. N. Presnukhin, V. F. Shan’gin, and B. A. Shatalov, Photoelectric Information Transducers, Mashinostroenie, Moscow (1974).Google Scholar
- 7.Yu. B. Kolyada, Yu. S. Korolev, N. T. Krushnyak, et al., “Optimization of photoelectric measurement systems,” Izmer. Tekhn., No. 12, 29–30 (2011).Google Scholar
- 8.V. N. Yanushkin, Yu. B. Kolyada, and N. T. Krushnyak, “A digital photoelectric mining surveyor’s tape measure,” Izmer. Tekhn., No. 10, 23–24 (2013).Google Scholar