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Measurement Techniques

, Volume 56, Issue 12, pp 1327–1332 | Cite as

A System for the Spectral Monitoring of the Deposition of Multilayer Dielectric Coatings

  • V. A. Labusov
  • Z. V. Semenov
  • I. A. Zarubin
  • M. S. Saushkin
  • G. V. Erg
  • S. I. Kovalev
Nanometrology
  • 77 Downloads

A high precision system for monitoring the thicknesses of the layers of multilayer dielectric coatings over a wide spectral range has been constructed. An example of the use of the system to construct an antireflection coating with a maximum reflection coefficient of 0.15% in the 400 – 660 nm spectral range on VU-2M vacuum equipment is presented.

Keywords

multilayer dielectric coatings deposition monitoring spectrophotometry thin films 

References

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Copyright information

© Springer Science+Business Media New York 2014

Authors and Affiliations

  • V. A. Labusov
    • 1
  • Z. V. Semenov
    • 1
  • I. A. Zarubin
    • 1
  • M. S. Saushkin
    • 1
  • G. V. Erg
    • 2
  • S. I. Kovalev
    • 2
  1. 1.Institute of Automation and Electrometry, Siberian Branch of the Russian Academy of SciencesNovosibirskRussia
  2. 2.Institute of Laser Physics, Siberian Branch of the Russian Academy of SciencesNovosibirskRussia

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