A System for the Spectral Monitoring of the Deposition of Multilayer Dielectric Coatings
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A high precision system for monitoring the thicknesses of the layers of multilayer dielectric coatings over a wide spectral range has been constructed. An example of the use of the system to construct an antireflection coating with a maximum reflection coefficient of 0.15% in the 400 – 660 nm spectral range on VU-2M vacuum equipment is presented.
Keywordsmultilayer dielectric coatings deposition monitoring spectrophotometry thin films
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