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A System for the Spectral Monitoring of the Deposition of Multilayer Dielectric Coatings

  • Nanometrology
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Measurement Techniques Aims and scope

A high precision system for monitoring the thicknesses of the layers of multilayer dielectric coatings over a wide spectral range has been constructed. An example of the use of the system to construct an antireflection coating with a maximum reflection coefficient of 0.15% in the 400 – 660 nm spectral range on VU-2M vacuum equipment is presented.

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Authors and Affiliations

  1. Institute of Automation and Electrometry, Siberian Branch of the Russian Academy of Sciences, Novosibirsk, Russia

    V. A. Labusov, Z. V. Semenov, I. A. Zarubin & M. S. Saushkin

  2. Institute of Laser Physics, Siberian Branch of the Russian Academy of Sciences, Novosibirsk, Russia

    G. V. Erg & S. I. Kovalev

Authors
  1. V. A. Labusov
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  2. Z. V. Semenov
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  3. I. A. Zarubin
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  4. M. S. Saushkin
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  5. G. V. Erg
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  6. S. I. Kovalev
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Corresponding author

Correspondence to V. A. Labusov.

Additional information

Translated from Izmeritel’naya Tekhnika, No. 12, pp. 11–14, December, 2013.

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Labusov, V.A., Semenov, Z.V., Zarubin, I.A. et al. A System for the Spectral Monitoring of the Deposition of Multilayer Dielectric Coatings. Meas Tech 56, 1327–1332 (2014). https://doi.org/10.1007/s11018-014-0376-5

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  • DOI: https://doi.org/10.1007/s11018-014-0376-5

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