A System for the Spectral Monitoring of the Deposition of Multilayer Dielectric Coatings
- 74 Downloads
A high precision system for monitoring the thicknesses of the layers of multilayer dielectric coatings over a wide spectral range has been constructed. An example of the use of the system to construct an antireflection coating with a maximum reflection coefficient of 0.15% in the 400 – 660 nm spectral range on VU-2M vacuum equipment is presented.
Keywordsmultilayer dielectric coatings deposition monitoring spectrophotometry thin films
- 2.S. Wilbrandt et al., “In-situ broadband monitoring and characterization of optical coatings,” OSA. Opt. Interference Coat. (2004).Google Scholar
- 3.V. A. Labusov et al., “The Kolibri multichannel spectrometer and its use for the simultaneous determination of alkali and alkali-earth metals by the plasma photometry method,” Zavod. Lab. Diagn. Mater., 73, No. S. C., 35-39 (2007).Google Scholar
- 5.The OptiLayer Thin Film Software Package, www.optilayer.com, accessed May 23, 2013.