The influence of temperature deformations of structural elements of measurement systems on the process of control of precision parts is considered. A method of determining the temperature deformation of measuring stands is proposed and tested. The method may be applied to devices used for linear measurements in the nanometric range.
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Translated from Izmeritel’naya Tekhnika, No. 9, pp. 34–36, September, 2013.
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Bashevskaya, O.S., Bushuev, S.V., Poduraev, Y.V. et al. An Investigation of the Influence of Temperature Deformations on the Precision of Linear Measurements. Meas Tech 56, 1016–1020 (2013). https://doi.org/10.1007/s11018-013-0322-y
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DOI: https://doi.org/10.1007/s11018-013-0322-y