Measurement Techniques

, Volume 54, Issue 12, pp 1346–1352 | Cite as

Use of mathematical modeling for measurements of nanodimensions in microelectronics


An “exact” mathematical model and a “simplified” mathematical model that each model video signals in a scanning electron microscope are developed. It is shown that the simplified model practically conforms to the exact model while requiring substantially lesser overhead of computational resources. Examples of the use of the models in the development of a new generation of application algorithms for precision measurement of the nanodimensional elements of modern integrated circuits are given.


mathematical modeling scanning electron microscopy microelectronics nanodimension 


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Copyright information

© Springer Science+Business Media, Inc. 2012

Authors and Affiliations

  1. 1.Institute of Arts and Information Technologies, DivisionSt. PetersburgRussia

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