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Measurement Techniques

, Volume 53, Issue 9, pp 996–1001 | Cite as

An investigation of methods of measuring the diameter of the electron probe of scanning electron microscopes using modern nanometer band standard measures

  • F. V. Bulygin
  • V. L. Lyaskovskii
Article

The problems of calibrating scanning electron microscopes using standard measures of foreign and Russian manufacture are considered. The advantages and disadvantages of the different types of standard measures and problems of the traceability to national standards are discussed, and experimental results are presented.

Key words

scanning electron microscope calibration probe 

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References

  1. 1.
    H. Bosse, “Microscopy for the characterization of nanostructures: trends and challenges,” Materials BIPM Workshop on Metrology at the Nanoscale, Paris, February 18–19, 2010.Google Scholar
  2. 2.
    GOST 8.628-2007, Nanometer Range Relief Standard Measures Made of Single-Crystal Silicon. Requirements on Geometrical Shape, Linear Dimensions, and Choice of Material for Manufacture.Google Scholar
  3. 3.
    GOST 8.644-2007, Standard Measures of Nanometer Range Relief with a Trapezoidal Profile of the Elements. Calibration Procedure.Google Scholar
  4. 4.
    GOST 8.636-2007, Scanning Electron Microscopes. Calibration Procedure. Google Scholar
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    L. Reimer, Scanning Electron Microscopy, Springer-Verlag, Berlin (1985).Google Scholar

Copyright information

© Springer Science+Business Media, Inc. 2010

Authors and Affiliations

  1. 1.All-Russia Research Institute of Optophysical Measurements (VNIIOFI)MoscowRussia

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