The problems of calibrating scanning electron microscopes using standard measures of foreign and Russian manufacture are considered. The advantages and disadvantages of the different types of standard measures and problems of the traceability to national standards are discussed, and experimental results are presented.
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Translated from Metrologiya, No. 7, pp. 34–43, July, 2010.
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Bulygin, F.V., Lyaskovskii, V.L. An investigation of methods of measuring the diameter of the electron probe of scanning electron microscopes using modern nanometer band standard measures. Meas Tech 53, 996–1001 (2010). https://doi.org/10.1007/s11018-010-9610-y
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DOI: https://doi.org/10.1007/s11018-010-9610-y