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Simulation of scattering processes of optical radiation by nanodimensional structures

  • Nanometrology
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Measurement Techniques Aims and scope

Mathematical simulation of the process of scattering of an optical wave by micro- or nano-scale structure on the basis of the vector equations of the electromagnetic field is performed. A rigorous analytic solution is obtained and the scattering problem solved by means of the method of finite elements.

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References

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Authors and Affiliations

  1. All-Russia Research Institute of Optophysical Measurements (VNIIOFI), Moscow, Russia

    G. G. Levin

  2. Lomonosov Moscow State University, Moscow, Russia

    Ya. A. Ilyushin

  3. All-Russia Research Institute of Metrological Service (VNIIMS), Moscow, Russia

    S. Yu. Zolotarevskii & S. A. Kononogov

Authors
  1. G. G. Levin
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  2. Ya. A. Ilyushin
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  3. S. Yu. Zolotarevskii
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  4. S. A. Kononogov
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Corresponding author

Correspondence to G. G. Levin.

Additional information

Translated from Metrologiya, No. 12, pp. 7–13, December, 2009.

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Levin, G.G., Ilyushin, Y.A., Zolotarevskii, S.Y. et al. Simulation of scattering processes of optical radiation by nanodimensional structures. Meas Tech 52, 1289–1293 (2009). https://doi.org/10.1007/s11018-010-9435-8

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  • DOI: https://doi.org/10.1007/s11018-010-9435-8

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