Measurement Techniques

, 52:739 | Cite as

Thin-film nano- and micro-electromechanical systems – the basis of contemporary and future pressure sensors for rocket and aviation engineering

  • E. M. Belozubov
  • V. A. Vasil’ev
  • N. V. Gromkov
Mechanical Measurements

Ways of improving information converters are considered, in particular, primary information converters (sensors). Problems are described that arise during the use of sensors in space rocket and aviation engineering. Designs are presented for thin-film nano- and micro-electromechanical systems that are the basis of contemporary and future tensoresistive pressure sensors. Areas of research are determined with the aim of minimizing the effect of critical destabilizing factors (temperature, vibration) within these systems and pressure sensors based upon them.

Key words

nano- and micro-electromechanical systems thin films tensoresistor sensor pressure 


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Copyright information

© Springer Science+Business Media, Inc. 2009

Authors and Affiliations

  • E. M. Belozubov
    • 1
  • V. A. Vasil’ev
    • 1
  • N. V. Gromkov
    • 1
  1. 1.Penza State UniversityPenzaRussia

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