A method is proposed for the analytic design of monitoring facilities that enables one to choose the characteristics on the basis of user optimality: maximum performance in using the facilities. That method does not require any additional data over and above those that a designer normally disposes of.
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References
D. S. L’vov, The Principles of Economic Machine Design [in Russian], Ekonomika, Moscow (1966).
G. M. Fikhtengol’ts, Textbook of Differential and Integral Calculus [in Russian], Nauka, Moscow (1966).
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Translated from Izmeritel’naya Tekhnika, No. 1, pp. 12–14, January, 2009.
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Bondarevskii, A.S., Krekoten, F.V. Analytic design of monitoring facilities for integrated circuit inspection. Meas Tech 52, 16–19 (2009). https://doi.org/10.1007/s11018-009-9220-8
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DOI: https://doi.org/10.1007/s11018-009-9220-8