Measurement Techniques

, Volume 52, Issue 1, pp 16–19 | Cite as

Analytic design of monitoring facilities for integrated circuit inspection

  • A. S. Bondarevskii
  • F. V. Krekoten

A method is proposed for the analytic design of monitoring facilities that enables one to choose the characteristics on the basis of user optimality: maximum performance in using the facilities. That method does not require any additional data over and above those that a designer normally disposes of.

Key words

analytic design integrated circuit monitoring target function mathematical model optimization 


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  1. 1.
    D. S. L’vov, The Principles of Economic Machine Design [in Russian], Ekonomika, Moscow (1966).Google Scholar
  2. 2.
    G. M. Fikhtengol’ts, Textbook of Differential and Integral Calculus [in Russian], Nauka, Moscow (1966).Google Scholar

Copyright information

© Springer Science+Business Media, Inc. 2009

Authors and Affiliations

  1. 1.MoscowRussia
  2. 2.Angstrem-M OAOMoscowRussia

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