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Measurement Techniques

, Volume 49, Issue 5, pp 524–528 | Cite as

Sensitivity of mos sensors to hydrogen, hydrogen sulfide, and nitrogen dioxide in different gas atmospheres

  • E. V. Emelin
  • I. N. Nikolaev
Physicochemical Measurements

Abstract

The sensitivity of metal-oxide-semiconductor (MOS) sensors of the Pd-Ta2O5-SiO2-Si type towards hydrogen, hydrogen sulfide and nitrogen dioxide is measured in atmospheres of air, nitrogen, and oxygen. It is demonstrated that MOS sensors are efficient in any chemically noncorrosive gas atmosphere, and also in a vacuum.

Key words

MOS sensor gas analyzer hydrogen hydrogen sulfide nitrogen dioxide 

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Copyright information

© Springer Science+Business Media, Inc. 2006

Authors and Affiliations

  • E. V. Emelin
  • I. N. Nikolaev

There are no affiliations available

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