Sensitivity of mos sensors to hydrogen, hydrogen sulfide, and nitrogen dioxide in different gas atmospheres
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The sensitivity of metal-oxide-semiconductor (MOS) sensors of the Pd-Ta2O5-SiO2-Si type towards hydrogen, hydrogen sulfide and nitrogen dioxide is measured in atmospheres of air, nitrogen, and oxygen. It is demonstrated that MOS sensors are efficient in any chemically noncorrosive gas atmosphere, and also in a vacuum.
Key wordsMOS sensor gas analyzer hydrogen hydrogen sulfide nitrogen dioxide
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