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Patterning of sol gel thin films by capillary force assisted soft lithographic technique

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Abstract

Patterning of sol gel based silica and silica–titania films has been developed at room temperature by soft lithographic technique. Corresponding metal alkoxides have been utilized for the preparation of precursor sols. Elastomeric stamps of polydimethylsiloxane (PDMS) are used to emboss patterns of a master grating on the as-prepared silica and silica–titania films obtained by sol gel process. Pressure-less capillary force lithography has been used to fabricate both 1-D and 2-D ordered structures of simple stripe patterns. A modified solvent assisted lithography and micro-molding in capillaries yielded stable and high fidelity 1-D structures for silica and silica–titania films over a large area.

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Acknowledgments

The authors would like to thank the Director, CGCRI, Kolkata for support and encouragement for the work. This work has been carried out under the sponsorship of DST, Govt. of India (Sanction No.: DST/TSG/PT/2006/74). Two authors (DS and RDR) thankfully acknowledge DST for providing their research fellowships.

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Author notes

  1. Devika Sil

    Present address: Temple University, Philadelphia, PA, USA

  2. Rabibrata Mukherjee

    Present address: Indian Institute of Technology (IIT), Kharagpur, 721302, India

Authors and Affiliations

  1. Sol–Gel Division, Central Glass and Ceramic Research Institute, 196 Raja S.C. Mullick Road, Jadavpur, Kolkata, 700 032, India

    Devika Sil, Sunirmal Jana & Prasanta Kumar Biswas

  2. Fibre Optics and Photonics Division, Central Glass and Ceramic Research Institute, 196 Raja S.C. Mullick Road, Jadavpur, Kolkata, 700 032, India

    Rimlee Deb Roy & Shyamal Kumar Bhadra

  3. Analytical Facility Division, Central Glass and Ceramic Research Institute, 196 Raja S.C. Mullick Road, Jadavpur, Kolkata, 700 032, India

    Rabibrata Mukherjee

Authors
  1. Devika Sil
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  2. Rimlee Deb Roy
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  3. Sunirmal Jana
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  4. Rabibrata Mukherjee
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  5. Shyamal Kumar Bhadra
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  6. Prasanta Kumar Biswas
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Corresponding authors

Correspondence to Sunirmal Jana or Prasanta Kumar Biswas.

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Sil, D., Deb Roy, R., Jana, S. et al. Patterning of sol gel thin films by capillary force assisted soft lithographic technique. J Sol-Gel Sci Technol 59, 117–127 (2011). https://doi.org/10.1007/s10971-011-2469-9

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