Dielectric, ferroelectric and optical properties of BaZr0.2Ti0.8O3 thin films prepared by sol–gel-hydrothermal process
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BaZr0.2Ti0.8O3 thin films on Pt/Ti/SiO2/Si substrates have been fabricated under low temperature conditions by a sol–gel-hydrothermal technique. The dielectric constant is 247–83 in the frequency range of 1 kHz–1 MHz. The corresponding dielectric loss is ~10−2. The capacitance–voltage curve shows strong non-linear dielectric behavior leading to a high tunability, up to ~30% at 1 kHz. The remanent polarization and coercive field at room temperature are measured to be ~1.5 μC/cm2 and ~90 kV/cm. The infrared optical properties of the thin films are investigated using an infrared spectroscopic ellipsometry in the wave number range of 800–4,000 cm−1. Optical constants of the thin films are simultaneously obtained.
KeywordsThin films Low temperature technique Dielectric properties
This research was supported by the Ministry of Sciences and Technology of China through a 973-project Grant No. 2009CB623302, Specialized Research Fund for the Doctoral Program of Higher Education (SRFDP20060247003), and this work was supported by Shanghai Committee of Science and Technology (contract No. 07DZ22302).