Skip to main content
Log in

Modified procedure for the sol–gel processing of indium–tin oxide (ITO) films

  • Original Paper
  • Published:
Journal of Sol-Gel Science and Technology Aims and scope Submit manuscript

Abstract

Dispersions of crystalline nanoscaled ITO and solutions of amorphous precursors were used for the preparation of transparent conductive films on glass both by large area dip-coating (30 × 30 cm2) and pad-printing. The advantages of both types of coating materials regarding single layer thickness and conductivity were combined by a coating-infiltration procedure. The resulting films showed a specific resistivity down to 1.77 10E−03 Ω cm after treatment in reducing atmosphere and an increased resistance to subsequent storage in air.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7

Similar content being viewed by others

References

  1. Minami T (2005) Semicond Sci Technol 20:S35

    Article  CAS  Google Scholar 

  2. Szyszka B (2001) Vakuum in Forschung und Praxis 1:38

    Article  Google Scholar 

  3. Leterrier Y, Medico L, Demarco F, Manson J, Betz U, Escola M, Kharrazi Olsson M, Atamny F (2004) Thin Solid Films 460:156

    Article  CAS  Google Scholar 

  4. Tang W, Cameron D (1984) Thin Solid Films 238:83

    Article  Google Scholar 

  5. Alam M, Cameron D (2001) J Vac Sci Technol 19:1642

    Article  CAS  Google Scholar 

  6. Kololuoma T, Johansson L, Maaninen A, Campbell J, Rantala J (2004) J Sol Gel Sci Technol 32:179

    Article  CAS  Google Scholar 

  7. Tahar R, Tahar N (2005) J Am Ceram Soc 88:1725

    Article  CAS  Google Scholar 

  8. Lim T, Kim C, Kim B, Choi B, Shim K (2005) J Mat Sci: Mater Electron 16(2):71

    Article  CAS  Google Scholar 

  9. Savarimuthu E, Lalithambika K, Raj A, Nehru L, Ramamurthy S, Thayumanavan A, Sanjeeviraja C, Jayachandran M (2007) J Phys Chem Solids 68(7):1380

    Article  CAS  Google Scholar 

  10. Schuler T, Krajewski T, Grobelse I, Aergerter M (2004) J Sol Gel Sci Technol 31:235

    Article  CAS  Google Scholar 

  11. Löbmann P, Röhlen P (2003) J Glass Sci Technol 76:1

    Google Scholar 

  12. Löbmann P (2005) J Sol Gel Sci Technol 33:275

    Article  Google Scholar 

  13. Kondoh E, Baklanov M, Lin E, Gidley D, Nakashima A (2001) Jpn J Appl Phys 40:323

    Article  Google Scholar 

  14. Danzebrink R, Biehl S, Maschek R, Mehrtens A, Aegerter M (1999) Adv Sci Technol (Faenza, Italy) 20:19

    CAS  Google Scholar 

  15. Scherer G (1997) Sol–Gel Sci Technol 8:353

    CAS  Google Scholar 

  16. Exarhos G, Zhou X (2007) Thin Solid Films 515:7025

    Article  CAS  Google Scholar 

Download references

Acknowledgements

The experimental support of S. Mehlig-Gromotka and I. Mospan is gratefully acknowledged. We acknowledge the dispersions and inks containing nanoscaled ITO provided by the Evonik Degussa Creavis as well as financial support within the frame of the projects of the Nanotronics Science-to-Business Center, financially supported by the state of North-Rhine Westphalia and co-financed by the European Union. Parts of this work have been funded within the framework METCO of the Fraunhofer-Gesellschaft.

Author information

Authors and Affiliations

Authors

Corresponding author

Correspondence to Peer Löbmann.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Prodi-Schwab, A., Lüthge, T., Jahn, R. et al. Modified procedure for the sol–gel processing of indium–tin oxide (ITO) films. J Sol-Gel Sci Technol 47, 68–73 (2008). https://doi.org/10.1007/s10971-008-1749-5

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s10971-008-1749-5

Keywords

Navigation