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The Fabrication of THz Emitting Mesas by Reactive Ion-Beam Etching of Superconducting Bi2212 with Multilayer Masks

  • H. Koseoglu
  • F. Turkoglu
  • Y. Simsek
  • L. Ozyuzer
Original Paper

Abstract

Generation of powerful THz radiation from intrinsic Josephson Junctions (IJJs) of Bi2Sr2CaCu2O8+δ (Bi2212) may require mesas with large lateral dimensions. However, there are difficulties in fabrication of perfect rectangular mesas. The lateral angles of mesas should be close to 90 degrees to obtain IJJs with same planar dimensions for synchronization of IJJs. We patterned Ta/photoresist and photoresist/Ta/photoresist masks on Bi2212 and used selective ion etching to overcome the thick photoresist layer shading on the lateral dimension of mesa during the ion-beam etching. The reactive ion-beam etchings have been done with ion beams of Ar, N2 and O2, and we have obtained mesas about 1 μm with lateral angle of approximately 50 to 75°, which is better than the mesas fabricated with photoresist mask.

Keywords

Reactive ion-beam etching Intrinsic Josephson junctions Terahertz radiation Bi2212 

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References

  1. 1.
    Tonouchi, M.: Cutting-edge terahertz technology. Nat. Photonics 1, 97–105 (2007) CrossRefADSGoogle Scholar
  2. 2.
    Bae, M.H., Lee, H.C.: Progress in THz generation using Josephson fluxon dynamics in intrinsic junctions. IEICE Trans. Electron. E 89, 411 (2006) Google Scholar
  3. 3.
    Tachiki, M., Koyama, T., Takahashi, S.: Electromagnetic Phenomena Related to a low frequency plasma in cuprate superconductors. Phys. Rev. B 50, 7065 (1994) CrossRefADSGoogle Scholar
  4. 4.
    Kleiner, R., Steinmeyer, F., Kunkel, G., Müller, P.: Intrinsic Josephson effects in Bi2Sr2CaCu2O8 single crystals. Phys. Rev. Lett. 68, 2394 (1992) CrossRefADSGoogle Scholar
  5. 5.
    Ozyuzer, L., Zasadzinski, J.F., Miyakawa, N.: Tunneling spectra and superconducting gap in Bi2Sr2CaCu2O8+d and Tl2Ba2CuO6+d. Int. J. Mod. Phys. B 13, 3721 (1999) CrossRefADSGoogle Scholar
  6. 6.
    Ozyuzer, L., Koshelev, A.E., Kurter, C., Gopalsami, N., Li, Q., Tachiki, M., Kadowaki, K., Tamamoto, T., Minami, H., Yamaguchi, H., Tachiki, T., Gray, K.E., Kwok, W.K., Welp, U.: Emission of coherent THz radiation from superconductors. Science 318, 1291 (2007) CrossRefADSGoogle Scholar
  7. 7.
    Ozyuzer, L., Simsek, Y., Koseoglu, H., Turkoglu, F., Kurter, C., Welp, U., Koshelev, A.E., Gray, K.E., Kwok, W.K., Yamamoto, T., Kadowaki, K., Koval, Y., Wang, H.B., Muller, P.: Terahertz wave emission from intrinsic Josephson junctions in high-Tc superconductors. Supercond. Sci. Technol. 22, 114009 (2009) CrossRefADSGoogle Scholar
  8. 8.
    Hu, X., Lin, S.Z.: Supercond. Sci. Technol. 23, 053001 (2010) CrossRefADSGoogle Scholar
  9. 9.
    Tuna, O., Selamet, Y., Aygun, G., Ozyuzer, L.: High quality ITO thin films grown by DC and RF sputtering without oxygen. J. Phys. D, Appl. Phys. 43, 055402 (2010) CrossRefADSGoogle Scholar
  10. 10.
    Nagai, Y., Tsuru, K., Terada, A., Yanagisawa, K.: Micropatterning of high-Tc superconducting film by nitrogen ion beam and Ta/resist multilayer mask. IEEE Trans. Magn. 27, 1622 (1991) CrossRefADSGoogle Scholar

Copyright information

© Springer Science+Business Media, LLC 2010

Authors and Affiliations

  • H. Koseoglu
    • 1
  • F. Turkoglu
    • 1
  • Y. Simsek
    • 1
  • L. Ozyuzer
    • 1
  1. 1.Department of PhysicsIzmir Institute of TechnologyIzmirTurkey

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