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Fabrication of Feedhorn-Coupled Transition Edge Sensor Arrays for Measurement of the Cosmic Microwave Background Polarization

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Abstract

Characterization of the minute cosmic microwave background polarization signature requires multi-frequency, high-throughput precision instrument systems. We have previously described the detector fabrication of a 40 GHz focal plane and now describe the fabrication of detector modules for measurement of the CMB at 90 GHz. The 90 GHz detectors are a scaled version of the 40 GHz architecture where, due to smaller size detectors, we have implemented a modular (wafer level) rather than the chip-level architecture. The new fabrication process utilizes the same design rules with the added challenge of increased wiring density to the 74 TES’s as well as a new wafer level hybridization procedure. The hexagonally shaped modules are tile-able, and as such can be used to form the large focal planes required for a space-based CMB polarimeter. The detectors described here will be deployed in two focal planes with seven modules each in the Johns Hopkins University led ground-based Cosmology Large Angular Scale Surveyor (CLASS) telescope.

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Acknowledgments

NASA ROSES/APRA grant provided support for the detector technology development. We acknowledge the National Science Foundation for their support of CLASS under Grants numbered 0959349 and 1429236.

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Correspondence to K. L. Denis.

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Denis, K.L., Ali, A., Appel, J. et al. Fabrication of Feedhorn-Coupled Transition Edge Sensor Arrays for Measurement of the Cosmic Microwave Background Polarization. J Low Temp Phys 184, 668–673 (2016). https://doi.org/10.1007/s10909-015-1366-y

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  • DOI: https://doi.org/10.1007/s10909-015-1366-y

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