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Journal of Low Temperature Physics

, Volume 162, Issue 5–6, pp 661–668 | Cite as

Characterization of MEMS Devices for the Study of Superfluid Helium Films

  • M. González
  • P. Bhupathi
  • B. H. Moon
  • P. Zheng
  • G. Ling
  • E. Garcell
  • H. B. Chan
  • Y. Lee
Article

Abstract

Measurements on the mechanical properties of MEMS resonators were performed to characterize such devices at room temperature and low temperatures. Using state-of-the-art silicon integrated circuit technology, we have designed, fabricated, and manufactured resonators consisting of a pair of parallel plates with a well-defined gap whose size can be controlled with a high accuracy down to the sub-micron range. A full study of resonance properties at various pressures was performed at room temperature. We will discuss the details of design, fabrication, and operation. These studies open up a window of opportunities to look for novel phenomena in quantum fluids such as in superfluid 3He films.

Keywords

Superfluid films MEMS Low-temperature devices 

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Copyright information

© Springer Science+Business Media, LLC 2010

Authors and Affiliations

  • M. González
    • 1
  • P. Bhupathi
    • 1
  • B. H. Moon
    • 1
  • P. Zheng
    • 1
  • G. Ling
    • 1
  • E. Garcell
    • 1
  • H. B. Chan
    • 1
  • Y. Lee
    • 1
  1. 1.Department of PhysicsUniversity of FloridaGainesvilleUSA

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