Study on the Anodic Bonding Mechanism of Polymer Electrolyte and Aluminum Based on MEMS Sensor Package

Abstract

In this paper, Polyethylene oxide (PEO) is used as the main material to prepare PEO–LiClO4, a polymer electrolyte packaging material. The complexation mechanism of PEO–LiClO4 was studied by fourier transform infrared (FT-IR) spectra. Finally, the bonding of PEO–LiClO4 with Al was completed by anodic bonding method. Secondly, the bonding mechanism of PEO–LiClO4 and Al was revealed by FT-IR and energy dispersive spectrum analysis. The results show that in a certain range, the more lithium salt content, the more Li+ number of ether oxygen coordination in the molecular chain of LiClO4 and PEO, the higher the degree of complexation; under the action of strong electrostatic field, the ion-coordination exchange of PEO–LiClO4 and Al at the bonding interface by ion diffusion is the direct reason for the two to achieve bonding.

This is a preview of subscription content, access via your institution.

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6

References

  1. 1.

    Z. Zhenyue, Excellent local enterprises in China's MEMS sensor potential market and subdivision field in 2019. China Electronics News 2019.5.31(003)

  2. 2.

    W. Yanan, Analysis of global MEMS sensor development status and market prospect in 2018. China Electronics News 2019.3.22(003)

  3. 3.

    R. Saha, N. Fritz, S.A. Bidstrup-Allen, P.A. Kohl, Packaging-compatible waferlevelcapping of MEMS devices. Microelectron. Eng. 104, 75–84 (2013)

    CAS  Article  Google Scholar 

  4. 4.

    N. Ren, Y. Song, C. Tao et al., Effect of the soft and hard segment composition on the properties of waterborne polyurethane-based solid polymer electrolyte for lithium ion batteries. J. Solid State Electrochem. 22(4), 1–13 (2017)

    Google Scholar 

  5. 5.

    J. Zhang, J. Zhao, L. Yue et al., Safety-reinforced poly(propylene carbonate)-based all-solid-state polymer electrolyte for ambient-temperature solid polymer lithium batteries. Adv. Energy Mater. 5(1501082), 1–10 (2015)

    Google Scholar 

  6. 6.

    D. Xiong, J. Cheng, H. Li, W. Deng, K. Ye, Anodic bonding of glass–ceramics to stainless steel coated with intermediate SiO2 layer. Microelectron. Eng. 87(9), 1741–1746 (2010)

    CAS  Article  Google Scholar 

  7. 7.

    P. Mrozek, Glass-to-glass anodic bonding using TiNx interlayers for fully transparent device applications. Sens. Actuators A 174, 139–143 (2012)

    CAS  Article  Google Scholar 

Download references

Acknowledgements

Foundation item: The work was financially supported by the National Natural Science Foundation of China (Grant No. 5187052685), and the Shanxi Provincial Natural Science Foundation of China (Grant No. 201801D121085).

Author information

Affiliations

Authors

Corresponding author

Correspondence to Xu Yin.

Additional information

Publisher's Note

Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.

Rights and permissions

Reprints and Permissions

About this article

Verify currency and authenticity via CrossMark

Cite this article

Yin, X., Liu, CR., Meng, YY. et al. Study on the Anodic Bonding Mechanism of Polymer Electrolyte and Aluminum Based on MEMS Sensor Package. J Inorg Organomet Polym 30, 3055–3059 (2020). https://doi.org/10.1007/s10904-020-01461-5

Download citation

Keywords

  • MEMS packaging
  • Anodic bonding
  • Polymer electrolyte
  • Mechanism