Study on the Anodic Bonding Mechanism of Polymer Electrolyte and Aluminum Based on MEMS Sensor Package


In this paper, Polyethylene oxide (PEO) is used as the main material to prepare PEO–LiClO4, a polymer electrolyte packaging material. The complexation mechanism of PEO–LiClO4 was studied by fourier transform infrared (FT-IR) spectra. Finally, the bonding of PEO–LiClO4 with Al was completed by anodic bonding method. Secondly, the bonding mechanism of PEO–LiClO4 and Al was revealed by FT-IR and energy dispersive spectrum analysis. The results show that in a certain range, the more lithium salt content, the more Li+ number of ether oxygen coordination in the molecular chain of LiClO4 and PEO, the higher the degree of complexation; under the action of strong electrostatic field, the ion-coordination exchange of PEO–LiClO4 and Al at the bonding interface by ion diffusion is the direct reason for the two to achieve bonding.

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Foundation item: The work was financially supported by the National Natural Science Foundation of China (Grant No. 5187052685), and the Shanxi Provincial Natural Science Foundation of China (Grant No. 201801D121085).

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Correspondence to Xu Yin.

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Yin, X., Liu, CR., Meng, YY. et al. Study on the Anodic Bonding Mechanism of Polymer Electrolyte and Aluminum Based on MEMS Sensor Package. J Inorg Organomet Polym 30, 3055–3059 (2020).

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  • MEMS packaging
  • Anodic bonding
  • Polymer electrolyte
  • Mechanism