Journal of Fusion Energy

, Volume 31, Issue 4, pp 401–404 | Cite as

Coating of Titanium Nitride on Stainless Steel Targets by a 4 kJ Plasma Focus Device

  • M. Omrani
  • M. Habibi
  • R. Amrollahi
Original Research


Titanium nitride thin films were deposited on stainless steel (SS316L) targets by using a 4 kJ plasma focus device. The corresponding energy flux delivered to SS316L surface is estimated to be 2.69 × 1013 kev cm−3 ns−1. X-ray diffraction analysis reveals the formation of a nanocrystalline titanium nitride coating on the surface of targets. Thickness of the elements found on the surface of treated samples which are obtained by Rutherford backscattering spectrometry analysis (RBS) were (×1015 at/cm2) .45% Ti, 50% N and 5% Fe. Scanning electron microscopy was used to indicate changes in surface morphology. Existence of grains in different size confirms the formation of TiN crystals on the surface of targets.


Amirkabir plasma focus device Surface treatment TiN SEM XRD RBS 


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Copyright information

© Springer Science+Business Media, LLC 2011

Authors and Affiliations

  1. 1.Amirkabir University of TechnologyTehranIran

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