Effect of Mg35Sb65 interlayer on the thermal stability and scaling of Ge2Sb2Te5 phase change thin film

Abstract

The effects of Mg35Sb65 layer on the thermal stability and thickness change rate of Ge2Sb2Te5 in superlattice films were studied. Compared with monolayer Ge2Sb2Te5 films, Mg35Sb65/Ge2Sb2Te5 films had higher resistance and crystallization temperature. The thermal stability and data retention capability were improved significantly. The fundamental reason of the change of film resistance was explained from the change of energy band gap. According to the reliability of phase change memory devices, the thickness change rate of thin films was analyzed in detail.

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References

  1. 1.

    Y. Hu, H. Zou, L. Yuan, J. Xue, Y. Sui, W. Wu, J. Zhang, X. Zhu, S. Song, Z. Song, Scr. Mater. 115, 19 (2016)

    CAS  Article  Google Scholar 

  2. 2.

    X. Ji, L. Wu, L. Cao, M. Zhu, F. Rao, Y. Zheng, W. Zhou, Z. Song, S. Feng, Appl. Phys. Lett. 106, 243103 (2015)

    Article  Google Scholar 

  3. 3.

    M. Zhu, L.C. Wu, F. Rao, Z.T. Song, K. Ren, X.L. Ji, S.N. Song, D.N. Yao, S.L. Feng, Appl. Phys. Lett. 104, 053119 (2014)

    Article  Google Scholar 

  4. 4.

    Y. Lu, M. Stegmaier, P. Nukala, M.A. Giambra, S. Ferrari, A. Busacca, W.H.P. Pernice, R. Agarwal, Nano Lett. 17, 150 (2017)

    CAS  Article  Google Scholar 

  5. 5.

    K. Ren, R.H. Li, X. Chen, Y. Wang, J.B. Shen, M.J. Xia, S.L. Lv, Z.G. Ji, Z.T. Song, Appl. Phys. Lett. 112, 073106 (2018)

    Article  Google Scholar 

  6. 6.

    G. Wang, Y. Zhang, P. Liu, J. Wang, Q. Nie, X. Shen, Mater. Lett. 213, 342 (2018)

    CAS  Article  Google Scholar 

  7. 7.

    L. Ruirui, W. Pengzhi, H. Zifang, Z. Jiwei, L. Xinyi, L. Tianshu, Thin Solid Films 625, 11 (2017)

    Article  Google Scholar 

  8. 8.

    W. Wu, Z. Zhao, B. Shen, J. Zhai, S. Song, Z. Song, Nanoscale 10, 7228 (2018)

    CAS  Article  Google Scholar 

  9. 9.

    P.H. Lee, P.C. Chang, D.S. Chao, J.H. Liang, S.C. Chang, M.J. Tsai, T.S. Chin, Thin Solid Films 520, 6636 (2012)

    CAS  Article  Google Scholar 

  10. 10.

    Z. He, W. Wu, X. Liu, J. Zhai, T. Lai, S. Song, Z. Song, Mater. Lett. 185, 399 (2016)

    CAS  Article  Google Scholar 

  11. 11.

    Y. Zhu, Z. Zhang, S. Song, H. Xie, Z. Song, X. Li, L. Shen, L. Li, L. Wu, B. Liu, Mater. Res. Bull. 64, 333 (2015)

    CAS  Article  Google Scholar 

  12. 12.

    T. Hou, Z. Jia, A. Feng, Z. Zhou, X. Liu, H. Lv, G. Wu, J. Mater. Sci. Technol. 68, 61 (2021)

    Article  Google Scholar 

  13. 13.

    H. Zhang, C. Shi, Z. Jia, X. Liu, B. Xu, D. Zhang, G. Wu, J. Coll. Interface Sci. 584, 382 (2021)

    CAS  Article  Google Scholar 

  14. 14.

    H. Yifeng, H. Zou, J. Zhang, J. Xue, Y. Sui, W. Wu, L. Yuan, X. Zhu, S. Song, Z. Song, Appl. Phys. Lett. 107, 263105 (2015)

    Article  Google Scholar 

  15. 15.

    Z. Gao, Z. Jia, K. Wang, X. Liu, L. Bi, G. Wu, Chem. Eng. J. 402, 125951 (2020)

    CAS  Article  Google Scholar 

  16. 16.

    C. Wang, J. Zhai, Z. Song, F. Shang, X. Yao, Appl. Surf. Sci. 257, 949 (2010)

    CAS  Article  Google Scholar 

  17. 17.

    D. Zhang, Y. Hu, H. You, X. Zhu, Y. Sun, H. Zou, Y. Zheng, Adv. Mater. Sci. Eng. 2018, 1 (2018)

    Google Scholar 

  18. 18.

    H. You, Y. Hu, X. Zhu, H. Zou, S. Song, Z. Song, J. Mater. Sci.: Mater. Electron. 28, 10199 (2017)

    CAS  Google Scholar 

  19. 19.

    H. Cheng, M. BrightSky, S. Raoux, C. Chen, P. Du, J. Wu, Y. Lin, T. Hsu, Y. Zhu, S. Kim, in IEEE International Conference Electron Devices Meeting. 13, 758 (2013). https://doi.org/10.1109/IEDM.2013.6724726

  20. 20.

    E.M. Vinod, K. Ramesh, R. Ganesan, K.S. Sangunni, Appl. Phys. Lett. 104, 063505 (2014)

    Article  Google Scholar 

  21. 21.

    S. Sun, Y. Hu, Y. Xu, T. Lai, J. Electron. Mater. 49, 980 (2020)

    CAS  Article  Google Scholar 

  22. 22.

    X. Guo, Y. Hu, Q. Chou, T. Lai, X. Zhu, J. Mater. Sci. Mater. Electron. 29, 16172 (2018)

  23. 23.

    H. Yifeng, X. Zhu, H. Zou, L. Zheng, S. Song, Z. Song, J. Alloys Compd. 696, 150 (2017)

    Article  Google Scholar 

  24. 24.

    H. Yifeng, Z. He, J. Zhai, P. Wu, T. Lai, S. Song, Z. Song, Appl. Phys. A Mater. Sci. Process. 121, 1125 (2015)

    Article  Google Scholar 

  25. 25.

    H. Zhang, Z. Jia, A. Feng, Z. Zhou, L. Chen, C. Zhang, X. Liu, G. Wu, Compos. Part B: Eng. 199, 108261 (2020)

    CAS  Article  Google Scholar 

  26. 26.

    H. Qian, H. Tong, M.-Z. He, H.-K. Ji, L.-J. Zhou, M. Xu, X.-S. Miao, Sci. Rep. 8, 486 (2018)

    Article  Google Scholar 

  27. 27.

    Y. Hu, Q. Qiu, X. Zhu, T. Lai, Appl. Surf. Sci. 505, 144337 (2020)

    CAS  Article  Google Scholar 

  28. 28.

    W. Wu, S. Chen, J. Zhai, X. Liu, T. Lai, S. Song, Z. Song, Nanotechnology 28, 405206 (2017)

    Article  Google Scholar 

  29. 29.

    M. Kong, Z. Jia, B. Wang, J. Dou, X. Liu, Y. Dong, B. Xu, G. Wu, Sustain. Mater. Technol. 26, e00219 (2020)

    Google Scholar 

  30. 30.

    F. Rao, Z.T. Song, K. Ren, X.L. Zhou, Y. Cheng, L.C. Wu, B. Liu, Nanotechnology 22, 10 (2011)

    Article  Google Scholar 

  31. 31.

    Y.G. Lu, S.N. Song, Z.T. Song, W.C. Ren, Y.L. Xiong, F. Rao, L.C. Wu, Y. Cheng, B. Liu, Scr. Mater. 66, 702 (2012)

    CAS  Article  Google Scholar 

  32. 32.

    W.K. Njoroge, H.-W. Wöltgens, M. Wuttig, J.Vac. Sci.Technol.A: Vac. Surf Films 20, 230 (2002)

    CAS  Article  Google Scholar 

Download references

Acknowledgements

This work was supported by the National Natural Science Foundation of China (No. 11974008 and 11774438) and Changzhou key laboratory of high technology research (CM20173002) and the Opening Project of Institute of Semiconductors, Chinese Academy of Sciences (KLSMS-1805), and practice Innovation Program of Jiangsu Province (SJCX19_0712).

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Correspondence to Song Sun or Yifeng Hu.

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Sun, S., Hu, Y., Lai, T. et al. Effect of Mg35Sb65 interlayer on the thermal stability and scaling of Ge2Sb2Te5 phase change thin film. J Mater Sci: Mater Electron (2021). https://doi.org/10.1007/s10854-021-05358-y

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